12/20/2010	7:46:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/20/2010	7:46:16 AM	Recipe started at 7:46 AM
12/20/2010	7:46:16 AM	H2 valve closed
12/20/2010	7:46:16 AM	BCl3 valve closed
12/20/2010	7:46:16 AM	PH3 valve closed
12/20/2010	7:46:16 AM	SiCl4 pre valve closed
12/20/2010	7:46:16 AM	SiCl4 post valve closed
12/20/2010	7:46:16 AM	Main Vac valve closed
12/20/2010	7:46:16 AM	Bypass valve closed
12/20/2010	7:46:16 AM	Bubbler valve closed
12/20/2010	7:46:16 AM	Helium valve opened
12/20/2010	7:46:16 AM	Helium MFC set to  500.000000
12/20/2010	7:46:16 AM	H2 MFC set to  0.000000
12/20/2010	7:46:16 AM	BCl3 MFC set to  0.000000
12/20/2010	7:46:16 AM	PHl3 MFC set to  0.000000
12/20/2010	7:46:16 AM	SiCl4 MFC set to  0.000000
12/20/2010	7:46:16 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	7:46:16 AM	Tube furnace set to 0
12/20/2010	7:47:36 AM	Helium valve closed
12/20/2010	7:47:36 AM	H2 valve closed
12/20/2010	7:47:36 AM	BCl3 valve closed
12/20/2010	7:47:36 AM	PH3 valve closed
12/20/2010	7:47:36 AM	SiCl4 pre valve closed
12/20/2010	7:47:36 AM	SiCl4 post valve closed
12/20/2010	7:47:36 AM	Main Vac valve closed
12/20/2010	7:47:36 AM	Bypass valve closed
12/20/2010	7:47:36 AM	Bubbler valve closed
12/20/2010	7:47:36 AM	Helium MFC set to  0.000000
12/20/2010	7:47:36 AM	H2 MFC set to  0.000000
12/20/2010	7:47:36 AM	BCl3 MFC set to  0.000000
12/20/2010	7:47:36 AM	PHl3 MFC set to  0.000000
12/20/2010	7:47:36 AM	SiCl4 MFC set to  0.000000
12/20/2010	7:47:36 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	7:47:36 AM	Tube furnace set to 0
12/20/2010	7:47:36 AM	Run finished at 7:47 AM
12/20/2010	7:47:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/20/2010	7:53:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/20/2010	7:53:57 AM	Recipe started at 7:53 AM
12/20/2010	7:53:57 AM	Helium valve closed
12/20/2010	7:53:57 AM	H2 valve closed
12/20/2010	7:53:57 AM	BCl3 valve closed
12/20/2010	7:53:57 AM	PH3 valve closed
12/20/2010	7:53:57 AM	SiCl4 pre valve closed
12/20/2010	7:53:57 AM	SiCl4 post valve closed
12/20/2010	7:53:57 AM	Main Vac valve closed
12/20/2010	7:53:57 AM	Bubbler valve closed
12/20/2010	7:53:57 AM	Bypass valve opened
12/20/2010	7:53:57 AM	Helium MFC set to  0.000000
12/20/2010	7:53:57 AM	H2 MFC set to  0.000000
12/20/2010	7:53:57 AM	BCl3 MFC set to  0.000000
12/20/2010	7:53:57 AM	PHl3 MFC set to  0.000000
12/20/2010	7:53:57 AM	SiCl4 MFC set to  0.000000
12/20/2010	7:53:57 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	7:53:57 AM	Tube furnace set to 0
12/20/2010	7:54:53 AM	Helium valve closed
12/20/2010	7:54:53 AM	H2 valve closed
12/20/2010	7:54:53 AM	BCl3 valve closed
12/20/2010	7:54:53 AM	PH3 valve closed
12/20/2010	7:54:53 AM	SiCl4 pre valve closed
12/20/2010	7:54:53 AM	SiCl4 post valve closed
12/20/2010	7:54:53 AM	Bubbler valve closed
12/20/2010	7:54:53 AM	Main Vac valve opened
12/20/2010	7:54:53 AM	Bypass valve opened
12/20/2010	7:54:53 AM	Helium MFC set to  0.000000
12/20/2010	7:54:53 AM	H2 MFC set to  0.000000
12/20/2010	7:54:53 AM	BCl3 MFC set to  0.000000
12/20/2010	7:54:53 AM	PHl3 MFC set to  0.000000
12/20/2010	7:54:53 AM	SiCl4 MFC set to  0.000000
12/20/2010	7:54:53 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	7:54:54 AM	Tube furnace set to 0
12/20/2010	7:55:19 AM	Run aborted at 7:55 AM
12/20/2010	7:55:19 AM	Helium valve closed
12/20/2010	7:55:19 AM	H2 valve closed
12/20/2010	7:55:19 AM	BCl3 valve closed
12/20/2010	7:55:19 AM	PH3 valve closed
12/20/2010	7:55:19 AM	SiCl4 pre valve closed
12/20/2010	7:55:19 AM	SiCl4 post valve closed
12/20/2010	7:55:19 AM	Bypass valve closed
12/20/2010	7:55:19 AM	Main Vac valve closed
12/20/2010	7:55:19 AM	Bubbler valve closed
12/20/2010	7:55:19 AM	Helium MFC set to  0.000000
12/20/2010	7:55:19 AM	H2 MFC set to  0.000000
12/20/2010	7:55:19 AM	BCl3 MFC set to  0.000000
12/20/2010	7:55:19 AM	PHl3 MFC set to  0.000000
12/20/2010	7:55:19 AM	SiCl4 MFC set to  0.000000
12/20/2010	7:55:19 AM	Tube furnace set to 0
12/20/2010	7:55:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/20/2010	7:55:22 AM	Bypass valve opened
12/20/2010	7:55:24 AM	Main Vac valve opened
12/20/2010	7:55:28 AM	Tube furnace set to 100
12/20/2010	7:56:23 AM	Helium MFC set to  100.000000
12/20/2010	7:56:24 AM	Helium valve opened
12/20/2010	7:56:27 AM	Tube furnace set to 150
12/20/2010	7:57:26 AM	Helium MFC set to  0.000000
12/20/2010	7:57:27 AM	Helium valve closed
12/20/2010	8:59:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/20/2010	8:59:04 AM	Recipe started at 8:59 AM
12/20/2010	8:59:04 AM	H2 valve closed
12/20/2010	8:59:04 AM	BCl3 valve closed
12/20/2010	8:59:04 AM	PH3 valve closed
12/20/2010	8:59:04 AM	SiCl4 pre valve closed
12/20/2010	8:59:04 AM	SiCl4 post valve closed
12/20/2010	8:59:04 AM	Main Vac valve closed
12/20/2010	8:59:04 AM	Bypass valve closed
12/20/2010	8:59:04 AM	Bubbler valve closed
12/20/2010	8:59:04 AM	Helium valve opened
12/20/2010	8:59:04 AM	Helium MFC set to  500.000000
12/20/2010	8:59:04 AM	H2 MFC set to  0.000000
12/20/2010	8:59:04 AM	BCl3 MFC set to  0.000000
12/20/2010	8:59:04 AM	PHl3 MFC set to  0.000000
12/20/2010	8:59:04 AM	SiCl4 MFC set to  0.000000
12/20/2010	8:59:04 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	8:59:04 AM	Tube furnace set to 0
12/20/2010	9:00:19 AM	Helium valve closed
12/20/2010	9:00:19 AM	H2 valve closed
12/20/2010	9:00:19 AM	BCl3 valve closed
12/20/2010	9:00:19 AM	PH3 valve closed
12/20/2010	9:00:19 AM	SiCl4 pre valve closed
12/20/2010	9:00:19 AM	SiCl4 post valve closed
12/20/2010	9:00:19 AM	Main Vac valve closed
12/20/2010	9:00:19 AM	Bypass valve closed
12/20/2010	9:00:19 AM	Bubbler valve closed
12/20/2010	9:00:19 AM	Helium MFC set to  0.000000
12/20/2010	9:00:19 AM	H2 MFC set to  0.000000
12/20/2010	9:00:19 AM	BCl3 MFC set to  0.000000
12/20/2010	9:00:19 AM	PHl3 MFC set to  0.000000
12/20/2010	9:00:19 AM	SiCl4 MFC set to  0.000000
12/20/2010	9:00:19 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	9:00:20 AM	Tube furnace set to 0
12/20/2010	9:00:20 AM	Run finished at 9:00 AM
12/20/2010	9:00:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/20/2010	9:03:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2010	9:03:41 AM	Recipe started at 9:03 AM
12/20/2010	9:03:41 AM	Helium valve closed
12/20/2010	9:03:41 AM	H2 valve closed
12/20/2010	9:03:41 AM	BCl3 valve closed
12/20/2010	9:03:41 AM	PH3 valve closed
12/20/2010	9:03:41 AM	SiCl4 pre valve closed
12/20/2010	9:03:41 AM	SiCl4 post valve closed
12/20/2010	9:03:41 AM	Main Vac valve closed
12/20/2010	9:03:41 AM	Bubbler valve closed
12/20/2010	9:03:41 AM	Bypass valve opened
12/20/2010	9:03:41 AM	Helium MFC set to  0.000000
12/20/2010	9:03:41 AM	H2 MFC set to  0.000000
12/20/2010	9:03:41 AM	BCl3 MFC set to  0.000000
12/20/2010	9:03:41 AM	PHl3 MFC set to  0.000000
12/20/2010	9:03:41 AM	SiCl4 MFC set to  0.000000
12/20/2010	9:03:41 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	9:03:41 AM	Tube furnace set to 0
12/20/2010	9:04:36 AM	Helium valve closed
12/20/2010	9:04:36 AM	H2 valve closed
12/20/2010	9:04:36 AM	BCl3 valve closed
12/20/2010	9:04:36 AM	PH3 valve closed
12/20/2010	9:04:36 AM	SiCl4 pre valve closed
12/20/2010	9:04:36 AM	SiCl4 post valve closed
12/20/2010	9:04:36 AM	Bubbler valve closed
12/20/2010	9:04:36 AM	Main Vac valve opened
12/20/2010	9:04:36 AM	Bypass valve opened
12/20/2010	9:04:36 AM	Helium MFC set to  0.000000
12/20/2010	9:04:36 AM	H2 MFC set to  0.000000
12/20/2010	9:04:36 AM	BCl3 MFC set to  0.000000
12/20/2010	9:04:36 AM	PHl3 MFC set to  0.000000
12/20/2010	9:04:36 AM	SiCl4 MFC set to  0.000000
12/20/2010	9:04:36 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	9:04:36 AM	Tube furnace set to 0
12/20/2010	9:04:36 AM	Run finished at 9:04 AM
12/20/2010	9:04:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2010	9:58:47 AM	Helium MFC set to  100.000000
12/20/2010	9:58:48 AM	Helium valve opened
12/20/2010	9:59:37 AM	Helium MFC set to  0.000000
12/20/2010	9:59:45 AM	Tube furnace set to 100
12/20/2010	10:00:48 AM	Helium MFC set to  100.000000
12/20/2010	10:04:16 AM	Helium MFC set to  0.000000
12/20/2010	10:04:17 AM	Helium valve closed
12/20/2010	10:05:22 AM	Main Vac valve closed
12/20/2010	10:05:23 AM	Bypass valve closed
12/20/2010	10:05:34 AM	Bypass valve opened
12/20/2010	10:05:35 AM	Main Vac valve opened
12/20/2010	10:05:41 AM	Helium MFC set to  100.000000
12/20/2010	10:05:42 AM	Helium valve opened
12/20/2010	10:06:52 AM	Helium MFC set to  0.000000
12/20/2010	10:06:53 AM	Helium valve closed
12/20/2010	10:08:26 AM	Recipe started at 10:08 AM
12/20/2010	10:08:26 AM	Helium valve closed
12/20/2010	10:08:26 AM	BCl3 valve closed
12/20/2010	10:08:27 AM	PH3 valve closed
12/20/2010	10:08:27 AM	SiCl4 pre valve closed
12/20/2010	10:08:27 AM	SiCl4 post valve closed
12/20/2010	10:08:27 AM	Main Vac valve closed
12/20/2010	10:08:27 AM	Bypass valve closed
12/20/2010	10:08:27 AM	Bubbler valve closed
12/20/2010	10:08:27 AM	H2 valve opened
12/20/2010	10:08:27 AM	Helium MFC set to  0.000000
12/20/2010	10:08:27 AM	H2 MFC set to  500.000000
12/20/2010	10:08:27 AM	BCl3 MFC set to  0.000000
12/20/2010	10:08:27 AM	PHl3 MFC set to  0.000000
12/20/2010	10:08:27 AM	SiCl4 MFC set to  0.000000
12/20/2010	10:08:27 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	10:08:27 AM	Tube furnace set to 200
12/20/2010	10:09:45 AM	Helium valve closed
12/20/2010	10:09:45 AM	BCl3 valve closed
12/20/2010	10:09:45 AM	PH3 valve closed
12/20/2010	10:09:45 AM	SiCl4 pre valve closed
12/20/2010	10:09:45 AM	SiCl4 post valve closed
12/20/2010	10:09:45 AM	Main Vac valve closed
12/20/2010	10:09:45 AM	Bypass valve closed
12/20/2010	10:09:45 AM	H2 valve opened
12/20/2010	10:09:45 AM	Bubbler valve opened
12/20/2010	10:09:45 AM	Helium MFC set to  0.000000
12/20/2010	10:09:45 AM	H2 MFC set to  400.000000
12/20/2010	10:09:45 AM	BCl3 MFC set to  0.000000
12/20/2010	10:09:45 AM	PHl3 MFC set to  0.000000
12/20/2010	10:09:45 AM	SiCl4 MFC set to  0.000000
12/20/2010	10:09:45 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	10:09:45 AM	Tube furnace set to 1001
12/20/2010	10:30:45 AM	Helium valve closed
12/20/2010	10:30:45 AM	BCl3 valve closed
12/20/2010	10:30:45 AM	PH3 valve closed
12/20/2010	10:30:45 AM	Main Vac valve closed
12/20/2010	10:30:45 AM	Bypass valve closed
12/20/2010	10:30:45 AM	H2 valve opened
12/20/2010	10:30:45 AM	SiCl4 pre valve opened
12/20/2010	10:30:45 AM	SiCl4 post valve opened
12/20/2010	10:30:45 AM	Bubbler valve opened
12/20/2010	10:30:45 AM	Helium MFC set to  0.000000
12/20/2010	10:30:45 AM	H2 MFC set to  400.000000
12/20/2010	10:30:45 AM	BCl3 MFC set to  0.000000
12/20/2010	10:30:45 AM	PHl3 MFC set to  0.000000
12/20/2010	10:30:45 AM	SiCl4 MFC set to  50.000000
12/20/2010	10:30:45 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	10:30:46 AM	Tube furnace set to 1000
12/20/2010	10:30:56 AM	Helium valve closed
12/20/2010	10:30:56 AM	PH3 valve closed
12/20/2010	10:30:56 AM	Main Vac valve closed
12/20/2010	10:30:56 AM	Bypass valve closed
12/20/2010	10:30:56 AM	H2 valve opened
12/20/2010	10:30:56 AM	BCl3 valve opened
12/20/2010	10:30:56 AM	SiCl4 pre valve opened
12/20/2010	10:30:56 AM	SiCl4 post valve opened
12/20/2010	10:30:56 AM	Bubbler valve opened
12/20/2010	10:30:56 AM	Helium MFC set to  0.000000
12/20/2010	10:30:56 AM	H2 MFC set to  500.000000
12/20/2010	10:30:56 AM	BCl3 MFC set to  12.000000
12/20/2010	10:30:56 AM	PHl3 MFC set to  0.000000
12/20/2010	10:30:56 AM	SiCl4 MFC set to  50.000000
12/20/2010	10:30:56 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	10:30:56 AM	Tube furnace set to 1000
12/20/2010	10:41:21 AM	Run aborted at 10:41 AM
12/20/2010	10:41:21 AM	Helium valve closed
12/20/2010	10:41:21 AM	H2 valve closed
12/20/2010	10:41:21 AM	BCl3 valve closed
12/20/2010	10:41:21 AM	PH3 valve closed
12/20/2010	10:41:21 AM	SiCl4 pre valve closed
12/20/2010	10:41:21 AM	SiCl4 post valve closed
12/20/2010	10:41:21 AM	Bypass valve closed
12/20/2010	10:41:21 AM	Main Vac valve closed
12/20/2010	10:41:21 AM	Bubbler valve closed
12/20/2010	10:41:21 AM	Helium MFC set to  0.000000
12/20/2010	10:41:21 AM	H2 MFC set to  0.000000
12/20/2010	10:41:21 AM	BCl3 MFC set to  0.000000
12/20/2010	10:41:21 AM	PHl3 MFC set to  0.000000
12/20/2010	10:41:21 AM	SiCl4 MFC set to  0.000000
12/20/2010	10:41:22 AM	Tube furnace set to 0
12/20/2010	10:41:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2010	10:41:44 AM	Recipe started at 10:41 AM
12/20/2010	10:41:44 AM	Helium valve closed
12/20/2010	10:41:44 AM	H2 valve closed
12/20/2010	10:41:44 AM	BCl3 valve closed
12/20/2010	10:41:44 AM	PH3 valve closed
12/20/2010	10:41:44 AM	SiCl4 pre valve closed
12/20/2010	10:41:44 AM	SiCl4 post valve closed
12/20/2010	10:41:44 AM	Main Vac valve closed
12/20/2010	10:41:44 AM	Bubbler valve closed
12/20/2010	10:41:44 AM	Bypass valve opened
12/20/2010	10:41:44 AM	Helium MFC set to  0.000000
12/20/2010	10:41:44 AM	H2 MFC set to  0.000000
12/20/2010	10:41:44 AM	BCl3 MFC set to  0.000000
12/20/2010	10:41:44 AM	PHl3 MFC set to  0.000000
12/20/2010	10:41:44 AM	SiCl4 MFC set to  0.000000
12/20/2010	10:41:44 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	10:41:44 AM	Tube furnace set to 0
12/20/2010	10:41:50 AM	Run aborted at 10:41 AM
12/20/2010	10:41:50 AM	Helium valve closed
12/20/2010	10:41:50 AM	H2 valve closed
12/20/2010	10:41:50 AM	BCl3 valve closed
12/20/2010	10:41:50 AM	PH3 valve closed
12/20/2010	10:41:50 AM	SiCl4 pre valve closed
12/20/2010	10:41:50 AM	SiCl4 post valve closed
12/20/2010	10:41:50 AM	Bypass valve closed
12/20/2010	10:41:50 AM	Main Vac valve closed
12/20/2010	10:41:50 AM	Bubbler valve closed
12/20/2010	10:41:50 AM	Helium MFC set to  0.000000
12/20/2010	10:41:50 AM	H2 MFC set to  0.000000
12/20/2010	10:41:50 AM	BCl3 MFC set to  0.000000
12/20/2010	10:41:50 AM	PHl3 MFC set to  0.000000
12/20/2010	10:41:50 AM	SiCl4 MFC set to  0.000000
12/20/2010	10:41:50 AM	Tube furnace set to 0
12/20/2010	10:41:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2010	10:41:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/20/2010	10:41:54 AM	Recipe started at 10:41 AM
12/20/2010	10:41:54 AM	H2 valve closed
12/20/2010	10:41:54 AM	BCl3 valve closed
12/20/2010	10:41:54 AM	PH3 valve closed
12/20/2010	10:41:54 AM	SiCl4 pre valve closed
12/20/2010	10:41:54 AM	SiCl4 post valve closed
12/20/2010	10:41:54 AM	Main Vac valve closed
12/20/2010	10:41:54 AM	Bypass valve closed
12/20/2010	10:41:54 AM	Bubbler valve closed
12/20/2010	10:41:54 AM	Helium valve opened
12/20/2010	10:41:54 AM	Helium MFC set to  500.000000
12/20/2010	10:41:54 AM	H2 MFC set to  0.000000
12/20/2010	10:41:54 AM	BCl3 MFC set to  0.000000
12/20/2010	10:41:54 AM	PHl3 MFC set to  0.000000
12/20/2010	10:41:54 AM	SiCl4 MFC set to  0.000000
12/20/2010	10:41:54 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	10:41:55 AM	Tube furnace set to 0
12/20/2010	10:42:08 AM	Run aborted at 10:42 AM
12/20/2010	10:42:08 AM	Helium valve closed
12/20/2010	10:42:08 AM	H2 valve closed
12/20/2010	10:42:08 AM	BCl3 valve closed
12/20/2010	10:42:08 AM	PH3 valve closed
12/20/2010	10:42:08 AM	SiCl4 pre valve closed
12/20/2010	10:42:08 AM	SiCl4 post valve closed
12/20/2010	10:42:08 AM	Bypass valve closed
12/20/2010	10:42:08 AM	Main Vac valve closed
12/20/2010	10:42:08 AM	Bubbler valve closed
12/20/2010	10:42:08 AM	Helium MFC set to  0.000000
12/20/2010	10:42:08 AM	H2 MFC set to  0.000000
12/20/2010	10:42:08 AM	BCl3 MFC set to  0.000000
12/20/2010	10:42:08 AM	PHl3 MFC set to  0.000000
12/20/2010	10:42:08 AM	SiCl4 MFC set to  0.000000
12/20/2010	10:42:08 AM	Tube furnace set to 0
12/20/2010	10:42:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/20/2010	10:42:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2010	10:42:45 AM	Recipe started at 10:42 AM
12/20/2010	10:42:45 AM	Helium valve closed
12/20/2010	10:42:45 AM	H2 valve closed
12/20/2010	10:42:45 AM	BCl3 valve closed
12/20/2010	10:42:45 AM	PH3 valve closed
12/20/2010	10:42:45 AM	SiCl4 pre valve closed
12/20/2010	10:42:45 AM	SiCl4 post valve closed
12/20/2010	10:42:45 AM	Main Vac valve closed
12/20/2010	10:42:45 AM	Bubbler valve closed
12/20/2010	10:42:45 AM	Bypass valve opened
12/20/2010	10:42:45 AM	Helium MFC set to  0.000000
12/20/2010	10:42:45 AM	H2 MFC set to  0.000000
12/20/2010	10:42:46 AM	BCl3 MFC set to  0.000000
12/20/2010	10:42:46 AM	PHl3 MFC set to  0.000000
12/20/2010	10:42:46 AM	SiCl4 MFC set to  0.000000
12/20/2010	10:42:46 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	10:42:46 AM	Tube furnace set to 0
12/20/2010	10:42:54 AM	Run aborted at 10:42 AM
12/20/2010	10:42:54 AM	Helium valve closed
12/20/2010	10:42:54 AM	H2 valve closed
12/20/2010	10:42:54 AM	BCl3 valve closed
12/20/2010	10:42:54 AM	PH3 valve closed
12/20/2010	10:42:54 AM	SiCl4 pre valve closed
12/20/2010	10:42:54 AM	SiCl4 post valve closed
12/20/2010	10:42:54 AM	Bypass valve closed
12/20/2010	10:42:54 AM	Main Vac valve closed
12/20/2010	10:42:54 AM	Bubbler valve closed
12/20/2010	10:42:54 AM	Helium MFC set to  0.000000
12/20/2010	10:42:54 AM	H2 MFC set to  0.000000
12/20/2010	10:42:54 AM	BCl3 MFC set to  0.000000
12/20/2010	10:42:54 AM	PHl3 MFC set to  0.000000
12/20/2010	10:42:54 AM	SiCl4 MFC set to  0.000000
12/20/2010	10:42:54 AM	Tube furnace set to 0
12/20/2010	10:42:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2010	10:42:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/20/2010	10:42:57 AM	Recipe started at 10:42 AM
12/20/2010	10:42:57 AM	H2 valve closed
12/20/2010	10:42:57 AM	BCl3 valve closed
12/20/2010	10:42:57 AM	PH3 valve closed
12/20/2010	10:42:57 AM	SiCl4 pre valve closed
12/20/2010	10:42:57 AM	SiCl4 post valve closed
12/20/2010	10:42:57 AM	Main Vac valve closed
12/20/2010	10:42:57 AM	Bypass valve closed
12/20/2010	10:42:57 AM	Bubbler valve closed
12/20/2010	10:42:57 AM	Helium valve opened
12/20/2010	10:42:57 AM	Helium MFC set to  500.000000
12/20/2010	10:42:57 AM	H2 MFC set to  0.000000
12/20/2010	10:42:57 AM	BCl3 MFC set to  0.000000
12/20/2010	10:42:57 AM	PHl3 MFC set to  0.000000
12/20/2010	10:42:57 AM	SiCl4 MFC set to  0.000000
12/20/2010	10:42:57 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	10:42:57 AM	Tube furnace set to 0
12/20/2010	10:43:37 AM	Helium valve closed
12/20/2010	10:43:37 AM	H2 valve closed
12/20/2010	10:43:37 AM	BCl3 valve closed
12/20/2010	10:43:37 AM	PH3 valve closed
12/20/2010	10:43:37 AM	SiCl4 pre valve closed
12/20/2010	10:43:37 AM	SiCl4 post valve closed
12/20/2010	10:43:37 AM	Main Vac valve closed
12/20/2010	10:43:37 AM	Bypass valve closed
12/20/2010	10:43:37 AM	Bubbler valve closed
12/20/2010	10:43:37 AM	Helium MFC set to  0.000000
12/20/2010	10:43:37 AM	H2 MFC set to  0.000000
12/20/2010	10:43:37 AM	BCl3 MFC set to  0.000000
12/20/2010	10:43:37 AM	PHl3 MFC set to  0.000000
12/20/2010	10:43:37 AM	SiCl4 MFC set to  0.000000
12/20/2010	10:43:37 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	10:43:37 AM	Tube furnace set to 0
12/20/2010	10:43:38 AM	Run finished at 10:43 AM
12/20/2010	10:43:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/20/2010	10:45:44 AM	Recipe started at 10:45 AM
12/20/2010	10:45:44 AM	H2 valve closed
12/20/2010	10:45:44 AM	BCl3 valve closed
12/20/2010	10:45:44 AM	PH3 valve closed
12/20/2010	10:45:44 AM	SiCl4 pre valve closed
12/20/2010	10:45:44 AM	SiCl4 post valve closed
12/20/2010	10:45:44 AM	Main Vac valve closed
12/20/2010	10:45:44 AM	Bypass valve closed
12/20/2010	10:45:44 AM	Bubbler valve closed
12/20/2010	10:45:44 AM	Helium valve opened
12/20/2010	10:45:44 AM	Helium MFC set to  500.000000
12/20/2010	10:45:44 AM	H2 MFC set to  0.000000
12/20/2010	10:45:44 AM	BCl3 MFC set to  0.000000
12/20/2010	10:45:44 AM	PHl3 MFC set to  0.000000
12/20/2010	10:45:44 AM	SiCl4 MFC set to  0.000000
12/20/2010	10:45:44 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	10:45:44 AM	Tube furnace set to 200
12/20/2010	10:45:50 AM	H2 valve closed
12/20/2010	10:45:50 AM	BCl3 valve closed
12/20/2010	10:45:50 AM	PH3 valve closed
12/20/2010	10:45:50 AM	SiCl4 pre valve closed
12/20/2010	10:45:50 AM	SiCl4 post valve closed
12/20/2010	10:45:50 AM	Main Vac valve closed
12/20/2010	10:45:50 AM	Bypass valve closed
12/20/2010	10:45:50 AM	Helium valve opened
12/20/2010	10:45:50 AM	Bubbler valve opened
12/20/2010	10:45:50 AM	Helium MFC set to  200.000000
12/20/2010	10:45:50 AM	H2 MFC set to  0.000000
12/20/2010	10:45:50 AM	BCl3 MFC set to  0.000000
12/20/2010	10:45:50 AM	PHl3 MFC set to  0.000000
12/20/2010	10:45:50 AM	SiCl4 MFC set to  0.000000
12/20/2010	10:45:50 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	10:45:50 AM	Tube furnace set to 200
12/20/2010	10:45:52 AM	Run aborted at 10:45 AM
12/20/2010	10:45:52 AM	Helium valve closed
12/20/2010	10:45:52 AM	H2 valve closed
12/20/2010	10:45:52 AM	BCl3 valve closed
12/20/2010	10:45:52 AM	PH3 valve closed
12/20/2010	10:45:52 AM	SiCl4 pre valve closed
12/20/2010	10:45:52 AM	SiCl4 post valve closed
12/20/2010	10:45:52 AM	Bypass valve closed
12/20/2010	10:45:52 AM	Main Vac valve closed
12/20/2010	10:45:52 AM	Bubbler valve closed
12/20/2010	10:45:52 AM	Helium MFC set to  0.000000
12/20/2010	10:45:52 AM	H2 MFC set to  0.000000
12/20/2010	10:45:52 AM	BCl3 MFC set to  0.000000
12/20/2010	10:45:52 AM	PHl3 MFC set to  0.000000
12/20/2010	10:45:52 AM	SiCl4 MFC set to  0.000000
12/20/2010	10:45:53 AM	Tube furnace set to 0
12/20/2010	10:48:02 AM	Helium MFC set to  100.000000
12/20/2010	10:48:04 AM	Helium valve opened
12/20/2010	10:48:09 AM	Bubbler valve opened
12/20/2010	10:48:22 AM	Helium MFC set to  100.000000
12/20/2010	10:48:27 AM	Bubbler valve closed
12/20/2010	10:48:31 AM	Helium MFC set to  0.000000
12/20/2010	10:48:32 AM	Helium valve closed
12/20/2010	10:50:38 AM	Helium MFC set to  200.000000
12/20/2010	10:50:39 AM	Helium valve opened
12/20/2010	10:50:49 AM	Bubbler valve opened
12/20/2010	10:50:53 AM	Bubbler valve closed
12/20/2010	10:50:54 AM	Helium valve closed
12/20/2010	10:50:56 AM	Helium MFC set to  0.000000
12/20/2010	10:51:30 AM	Helium MFC set to  200.000000
12/20/2010	10:51:31 AM	Helium valve opened
12/20/2010	10:51:36 AM	Bubbler valve opened
12/20/2010	10:52:01 AM	Helium MFC set to  400.000000
12/20/2010	10:52:12 AM	Helium MFC set to  500.000000
12/20/2010	10:52:29 AM	Helium MFC set to  500.000000
12/20/2010	10:52:40 AM	Helium MFC set to  100.000000
12/20/2010	10:52:42 AM	Bubbler valve closed
12/20/2010	10:52:43 AM	Helium valve closed
12/20/2010	10:52:43 AM	Helium valve opened
12/20/2010	10:52:43 AM	Helium valve closed
12/20/2010	10:52:47 AM	Helium MFC set to  0.000000
12/20/2010	11:07:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2010	11:07:24 AM	Recipe started at 11:07 AM
12/20/2010	11:07:24 AM	Helium valve closed
12/20/2010	11:07:24 AM	H2 valve closed
12/20/2010	11:07:24 AM	BCl3 valve closed
12/20/2010	11:07:24 AM	PH3 valve closed
12/20/2010	11:07:24 AM	SiCl4 pre valve closed
12/20/2010	11:07:24 AM	SiCl4 post valve closed
12/20/2010	11:07:24 AM	Main Vac valve closed
12/20/2010	11:07:24 AM	Bubbler valve closed
12/20/2010	11:07:24 AM	Bypass valve opened
12/20/2010	11:07:24 AM	Helium MFC set to  0.000000
12/20/2010	11:07:24 AM	H2 MFC set to  0.000000
12/20/2010	11:07:24 AM	BCl3 MFC set to  0.000000
12/20/2010	11:07:24 AM	PHl3 MFC set to  0.000000
12/20/2010	11:07:24 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:07:25 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:07:25 AM	Tube furnace set to 0
12/20/2010	11:08:22 AM	Helium valve closed
12/20/2010	11:08:22 AM	H2 valve closed
12/20/2010	11:08:22 AM	BCl3 valve closed
12/20/2010	11:08:22 AM	PH3 valve closed
12/20/2010	11:08:22 AM	SiCl4 pre valve closed
12/20/2010	11:08:22 AM	SiCl4 post valve closed
12/20/2010	11:08:22 AM	Bubbler valve closed
12/20/2010	11:08:22 AM	Main Vac valve opened
12/20/2010	11:08:22 AM	Bypass valve opened
12/20/2010	11:08:22 AM	Helium MFC set to  0.000000
12/20/2010	11:08:22 AM	H2 MFC set to  0.000000
12/20/2010	11:08:22 AM	BCl3 MFC set to  0.000000
12/20/2010	11:08:22 AM	PHl3 MFC set to  0.000000
12/20/2010	11:08:22 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:08:22 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:08:22 AM	Tube furnace set to 0
12/20/2010	11:08:22 AM	Run finished at 11:08 AM
12/20/2010	11:08:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2010	11:17:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/20/2010	11:17:28 AM	Recipe started at 11:17 AM
12/20/2010	11:17:28 AM	Helium valve closed
12/20/2010	11:17:28 AM	H2 valve closed
12/20/2010	11:17:28 AM	BCl3 valve closed
12/20/2010	11:17:28 AM	PH3 valve closed
12/20/2010	11:17:28 AM	SiCl4 pre valve closed
12/20/2010	11:17:28 AM	SiCl4 post valve closed
12/20/2010	11:17:28 AM	Main Vac valve closed
12/20/2010	11:17:28 AM	Bubbler valve closed
12/20/2010	11:17:28 AM	Bypass valve opened
12/20/2010	11:17:28 AM	Helium MFC set to  0.000000
12/20/2010	11:17:28 AM	H2 MFC set to  0.000000
12/20/2010	11:17:28 AM	BCl3 MFC set to  0.000000
12/20/2010	11:17:28 AM	PHl3 MFC set to  0.000000
12/20/2010	11:17:28 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:17:28 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:17:28 AM	Tube furnace set to 0
12/20/2010	11:17:28 AM	Helium valve closed
12/20/2010	11:17:28 AM	H2 valve closed
12/20/2010	11:17:28 AM	BCl3 valve closed
12/20/2010	11:17:28 AM	PH3 valve closed
12/20/2010	11:17:28 AM	SiCl4 pre valve closed
12/20/2010	11:17:28 AM	SiCl4 post valve closed
12/20/2010	11:17:28 AM	Bubbler valve closed
12/20/2010	11:17:28 AM	Main Vac valve opened
12/20/2010	11:17:28 AM	Bypass valve opened
12/20/2010	11:17:28 AM	Helium MFC set to  0.000000
12/20/2010	11:17:28 AM	H2 MFC set to  0.000000
12/20/2010	11:17:28 AM	BCl3 MFC set to  0.000000
12/20/2010	11:17:28 AM	PHl3 MFC set to  0.000000
12/20/2010	11:17:28 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:17:28 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:17:29 AM	Tube furnace set to 0
12/20/2010	11:18:29 AM	H2 valve closed
12/20/2010	11:18:29 AM	BCl3 valve closed
12/20/2010	11:18:29 AM	PH3 valve closed
12/20/2010	11:18:29 AM	SiCl4 pre valve closed
12/20/2010	11:18:29 AM	SiCl4 post valve closed
12/20/2010	11:18:29 AM	Bubbler valve closed
12/20/2010	11:18:29 AM	Helium valve opened
12/20/2010	11:18:29 AM	Main Vac valve opened
12/20/2010	11:18:29 AM	Bypass valve opened
12/20/2010	11:18:29 AM	Helium MFC set to  100.000000
12/20/2010	11:18:29 AM	H2 MFC set to  0.000000
12/20/2010	11:18:29 AM	BCl3 MFC set to  0.000000
12/20/2010	11:18:29 AM	PHl3 MFC set to  0.000000
12/20/2010	11:18:29 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:18:29 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:18:29 AM	Tube furnace set to 0
12/20/2010	11:19:29 AM	Helium valve closed
12/20/2010	11:19:29 AM	H2 valve closed
12/20/2010	11:19:29 AM	BCl3 valve closed
12/20/2010	11:19:29 AM	PH3 valve closed
12/20/2010	11:19:29 AM	SiCl4 pre valve closed
12/20/2010	11:19:29 AM	SiCl4 post valve closed
12/20/2010	11:19:29 AM	Bubbler valve closed
12/20/2010	11:19:29 AM	Main Vac valve opened
12/20/2010	11:19:29 AM	Bypass valve opened
12/20/2010	11:19:29 AM	Helium MFC set to  0.000000
12/20/2010	11:19:29 AM	H2 MFC set to  0.000000
12/20/2010	11:19:29 AM	BCl3 MFC set to  0.000000
12/20/2010	11:19:29 AM	PHl3 MFC set to  0.000000
12/20/2010	11:19:29 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:19:29 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:19:29 AM	Tube furnace set to 0
12/20/2010	11:20:29 AM	H2 valve closed
12/20/2010	11:20:29 AM	BCl3 valve closed
12/20/2010	11:20:29 AM	PH3 valve closed
12/20/2010	11:20:29 AM	SiCl4 pre valve closed
12/20/2010	11:20:29 AM	SiCl4 post valve closed
12/20/2010	11:20:29 AM	Bubbler valve closed
12/20/2010	11:20:29 AM	Helium valve opened
12/20/2010	11:20:29 AM	Main Vac valve opened
12/20/2010	11:20:29 AM	Bypass valve opened
12/20/2010	11:20:29 AM	Helium MFC set to  100.000000
12/20/2010	11:20:29 AM	H2 MFC set to  0.000000
12/20/2010	11:20:29 AM	BCl3 MFC set to  0.000000
12/20/2010	11:20:29 AM	PHl3 MFC set to  0.000000
12/20/2010	11:20:29 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:20:29 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:20:29 AM	Tube furnace set to 0
12/20/2010	11:21:29 AM	Helium valve closed
12/20/2010	11:21:29 AM	H2 valve closed
12/20/2010	11:21:29 AM	BCl3 valve closed
12/20/2010	11:21:29 AM	PH3 valve closed
12/20/2010	11:21:29 AM	SiCl4 pre valve closed
12/20/2010	11:21:29 AM	SiCl4 post valve closed
12/20/2010	11:21:29 AM	Bubbler valve closed
12/20/2010	11:21:29 AM	Main Vac valve opened
12/20/2010	11:21:29 AM	Bypass valve opened
12/20/2010	11:21:29 AM	Helium MFC set to  0.000000
12/20/2010	11:21:29 AM	H2 MFC set to  0.000000
12/20/2010	11:21:29 AM	BCl3 MFC set to  0.000000
12/20/2010	11:21:29 AM	PHl3 MFC set to  0.000000
12/20/2010	11:21:29 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:21:29 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:21:29 AM	Tube furnace set to 0
12/20/2010	11:22:29 AM	H2 valve closed
12/20/2010	11:22:29 AM	BCl3 valve closed
12/20/2010	11:22:29 AM	PH3 valve closed
12/20/2010	11:22:29 AM	SiCl4 pre valve closed
12/20/2010	11:22:29 AM	SiCl4 post valve closed
12/20/2010	11:22:29 AM	Bubbler valve closed
12/20/2010	11:22:29 AM	Helium valve opened
12/20/2010	11:22:29 AM	Main Vac valve opened
12/20/2010	11:22:29 AM	Bypass valve opened
12/20/2010	11:22:29 AM	Helium MFC set to  100.000000
12/20/2010	11:22:29 AM	H2 MFC set to  0.000000
12/20/2010	11:22:29 AM	BCl3 MFC set to  0.000000
12/20/2010	11:22:29 AM	PHl3 MFC set to  0.000000
12/20/2010	11:22:29 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:22:29 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:22:30 AM	Tube furnace set to 0
12/20/2010	11:23:30 AM	Helium valve closed
12/20/2010	11:23:30 AM	H2 valve closed
12/20/2010	11:23:30 AM	BCl3 valve closed
12/20/2010	11:23:30 AM	PH3 valve closed
12/20/2010	11:23:30 AM	SiCl4 pre valve closed
12/20/2010	11:23:30 AM	SiCl4 post valve closed
12/20/2010	11:23:30 AM	Bubbler valve closed
12/20/2010	11:23:30 AM	Main Vac valve opened
12/20/2010	11:23:30 AM	Bypass valve opened
12/20/2010	11:23:30 AM	Helium MFC set to  0.000000
12/20/2010	11:23:30 AM	H2 MFC set to  0.000000
12/20/2010	11:23:30 AM	BCl3 MFC set to  0.000000
12/20/2010	11:23:30 AM	PHl3 MFC set to  0.000000
12/20/2010	11:23:30 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:23:30 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:23:30 AM	Tube furnace set to 0
12/20/2010	11:24:30 AM	H2 valve closed
12/20/2010	11:24:30 AM	BCl3 valve closed
12/20/2010	11:24:30 AM	PH3 valve closed
12/20/2010	11:24:30 AM	SiCl4 pre valve closed
12/20/2010	11:24:30 AM	SiCl4 post valve closed
12/20/2010	11:24:30 AM	Bubbler valve closed
12/20/2010	11:24:30 AM	Helium valve opened
12/20/2010	11:24:30 AM	Main Vac valve opened
12/20/2010	11:24:30 AM	Bypass valve opened
12/20/2010	11:24:30 AM	Helium MFC set to  100.000000
12/20/2010	11:24:30 AM	H2 MFC set to  0.000000
12/20/2010	11:24:30 AM	BCl3 MFC set to  0.000000
12/20/2010	11:24:30 AM	PHl3 MFC set to  0.000000
12/20/2010	11:24:30 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:24:30 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:24:30 AM	Tube furnace set to 0
12/20/2010	11:25:30 AM	Helium valve closed
12/20/2010	11:25:30 AM	H2 valve closed
12/20/2010	11:25:30 AM	BCl3 valve closed
12/20/2010	11:25:30 AM	PH3 valve closed
12/20/2010	11:25:30 AM	SiCl4 pre valve closed
12/20/2010	11:25:30 AM	SiCl4 post valve closed
12/20/2010	11:25:30 AM	Bubbler valve closed
12/20/2010	11:25:30 AM	Main Vac valve opened
12/20/2010	11:25:30 AM	Bypass valve opened
12/20/2010	11:25:30 AM	Helium MFC set to  0.000000
12/20/2010	11:25:30 AM	H2 MFC set to  0.000000
12/20/2010	11:25:30 AM	BCl3 MFC set to  0.000000
12/20/2010	11:25:30 AM	PHl3 MFC set to  0.000000
12/20/2010	11:25:30 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:25:30 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:25:30 AM	Tube furnace set to 0
12/20/2010	11:26:30 AM	H2 valve closed
12/20/2010	11:26:30 AM	BCl3 valve closed
12/20/2010	11:26:30 AM	PH3 valve closed
12/20/2010	11:26:30 AM	SiCl4 pre valve closed
12/20/2010	11:26:30 AM	SiCl4 post valve closed
12/20/2010	11:26:30 AM	Bubbler valve closed
12/20/2010	11:26:30 AM	Helium valve opened
12/20/2010	11:26:30 AM	Main Vac valve opened
12/20/2010	11:26:30 AM	Bypass valve opened
12/20/2010	11:26:30 AM	Helium MFC set to  100.000000
12/20/2010	11:26:30 AM	H2 MFC set to  0.000000
12/20/2010	11:26:30 AM	BCl3 MFC set to  0.000000
12/20/2010	11:26:30 AM	PHl3 MFC set to  0.000000
12/20/2010	11:26:30 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:26:30 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:26:30 AM	Tube furnace set to 0
12/20/2010	11:27:30 AM	Helium valve closed
12/20/2010	11:27:30 AM	H2 valve closed
12/20/2010	11:27:30 AM	BCl3 valve closed
12/20/2010	11:27:30 AM	PH3 valve closed
12/20/2010	11:27:30 AM	SiCl4 pre valve closed
12/20/2010	11:27:30 AM	SiCl4 post valve closed
12/20/2010	11:27:30 AM	Bubbler valve closed
12/20/2010	11:27:30 AM	Main Vac valve opened
12/20/2010	11:27:30 AM	Bypass valve opened
12/20/2010	11:27:30 AM	Helium MFC set to  0.000000
12/20/2010	11:27:30 AM	H2 MFC set to  0.000000
12/20/2010	11:27:30 AM	BCl3 MFC set to  0.000000
12/20/2010	11:27:30 AM	PHl3 MFC set to  0.000000
12/20/2010	11:27:30 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:27:30 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:27:31 AM	Tube furnace set to 0
12/20/2010	11:28:31 AM	H2 valve closed
12/20/2010	11:28:31 AM	BCl3 valve closed
12/20/2010	11:28:31 AM	PH3 valve closed
12/20/2010	11:28:31 AM	SiCl4 pre valve closed
12/20/2010	11:28:31 AM	SiCl4 post valve closed
12/20/2010	11:28:31 AM	Bubbler valve closed
12/20/2010	11:28:31 AM	Helium valve opened
12/20/2010	11:28:31 AM	Main Vac valve opened
12/20/2010	11:28:31 AM	Bypass valve opened
12/20/2010	11:28:31 AM	Helium MFC set to  100.000000
12/20/2010	11:28:31 AM	H2 MFC set to  0.000000
12/20/2010	11:28:31 AM	BCl3 MFC set to  0.000000
12/20/2010	11:28:31 AM	PHl3 MFC set to  0.000000
12/20/2010	11:28:31 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:28:31 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:28:31 AM	Tube furnace set to 0
12/20/2010	11:29:31 AM	Helium valve closed
12/20/2010	11:29:31 AM	H2 valve closed
12/20/2010	11:29:31 AM	BCl3 valve closed
12/20/2010	11:29:31 AM	PH3 valve closed
12/20/2010	11:29:31 AM	SiCl4 pre valve closed
12/20/2010	11:29:31 AM	SiCl4 post valve closed
12/20/2010	11:29:31 AM	Bubbler valve closed
12/20/2010	11:29:31 AM	Main Vac valve opened
12/20/2010	11:29:31 AM	Bypass valve opened
12/20/2010	11:29:31 AM	Helium MFC set to  0.000000
12/20/2010	11:29:31 AM	H2 MFC set to  0.000000
12/20/2010	11:29:31 AM	BCl3 MFC set to  0.000000
12/20/2010	11:29:31 AM	PHl3 MFC set to  0.000000
12/20/2010	11:29:31 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:29:31 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:29:31 AM	Tube furnace set to 0
12/20/2010	11:30:31 AM	H2 valve closed
12/20/2010	11:30:31 AM	BCl3 valve closed
12/20/2010	11:30:31 AM	PH3 valve closed
12/20/2010	11:30:31 AM	SiCl4 pre valve closed
12/20/2010	11:30:31 AM	SiCl4 post valve closed
12/20/2010	11:30:31 AM	Bubbler valve closed
12/20/2010	11:30:31 AM	Helium valve opened
12/20/2010	11:30:31 AM	Main Vac valve opened
12/20/2010	11:30:31 AM	Bypass valve opened
12/20/2010	11:30:31 AM	Helium MFC set to  100.000000
12/20/2010	11:30:31 AM	H2 MFC set to  0.000000
12/20/2010	11:30:31 AM	BCl3 MFC set to  0.000000
12/20/2010	11:30:31 AM	PHl3 MFC set to  0.000000
12/20/2010	11:30:31 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:30:31 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:30:31 AM	Tube furnace set to 0
12/20/2010	11:31:31 AM	Helium valve closed
12/20/2010	11:31:31 AM	H2 valve closed
12/20/2010	11:31:31 AM	BCl3 valve closed
12/20/2010	11:31:31 AM	PH3 valve closed
12/20/2010	11:31:31 AM	SiCl4 pre valve closed
12/20/2010	11:31:31 AM	SiCl4 post valve closed
12/20/2010	11:31:31 AM	Bubbler valve closed
12/20/2010	11:31:31 AM	Main Vac valve opened
12/20/2010	11:31:31 AM	Bypass valve opened
12/20/2010	11:31:31 AM	Helium MFC set to  0.000000
12/20/2010	11:31:31 AM	H2 MFC set to  0.000000
12/20/2010	11:31:31 AM	BCl3 MFC set to  0.000000
12/20/2010	11:31:31 AM	PHl3 MFC set to  0.000000
12/20/2010	11:31:31 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:31:31 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:31:31 AM	Tube furnace set to 0
12/20/2010	11:32:31 AM	H2 valve closed
12/20/2010	11:32:31 AM	BCl3 valve closed
12/20/2010	11:32:31 AM	PH3 valve closed
12/20/2010	11:32:31 AM	SiCl4 pre valve closed
12/20/2010	11:32:31 AM	SiCl4 post valve closed
12/20/2010	11:32:31 AM	Bubbler valve closed
12/20/2010	11:32:31 AM	Helium valve opened
12/20/2010	11:32:31 AM	Main Vac valve opened
12/20/2010	11:32:31 AM	Bypass valve opened
12/20/2010	11:32:31 AM	Helium MFC set to  100.000000
12/20/2010	11:32:31 AM	H2 MFC set to  0.000000
12/20/2010	11:32:31 AM	BCl3 MFC set to  0.000000
12/20/2010	11:32:31 AM	PHl3 MFC set to  0.000000
12/20/2010	11:32:31 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:32:31 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:32:32 AM	Tube furnace set to 0
12/20/2010	11:33:32 AM	Helium valve closed
12/20/2010	11:33:32 AM	H2 valve closed
12/20/2010	11:33:32 AM	BCl3 valve closed
12/20/2010	11:33:32 AM	PH3 valve closed
12/20/2010	11:33:32 AM	SiCl4 pre valve closed
12/20/2010	11:33:32 AM	SiCl4 post valve closed
12/20/2010	11:33:32 AM	Bubbler valve closed
12/20/2010	11:33:32 AM	Main Vac valve opened
12/20/2010	11:33:32 AM	Bypass valve opened
12/20/2010	11:33:32 AM	Helium MFC set to  0.000000
12/20/2010	11:33:32 AM	H2 MFC set to  0.000000
12/20/2010	11:33:32 AM	BCl3 MFC set to  0.000000
12/20/2010	11:33:32 AM	PHl3 MFC set to  0.000000
12/20/2010	11:33:32 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:33:32 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:33:32 AM	Tube furnace set to 0
12/20/2010	11:34:32 AM	H2 valve closed
12/20/2010	11:34:32 AM	BCl3 valve closed
12/20/2010	11:34:32 AM	PH3 valve closed
12/20/2010	11:34:32 AM	SiCl4 pre valve closed
12/20/2010	11:34:32 AM	SiCl4 post valve closed
12/20/2010	11:34:32 AM	Bubbler valve closed
12/20/2010	11:34:32 AM	Helium valve opened
12/20/2010	11:34:32 AM	Main Vac valve opened
12/20/2010	11:34:32 AM	Bypass valve opened
12/20/2010	11:34:32 AM	Helium MFC set to  100.000000
12/20/2010	11:34:32 AM	H2 MFC set to  0.000000
12/20/2010	11:34:32 AM	BCl3 MFC set to  0.000000
12/20/2010	11:34:32 AM	PHl3 MFC set to  0.000000
12/20/2010	11:34:32 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:34:32 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:34:32 AM	Tube furnace set to 0
12/20/2010	11:35:32 AM	Helium valve closed
12/20/2010	11:35:32 AM	H2 valve closed
12/20/2010	11:35:32 AM	BCl3 valve closed
12/20/2010	11:35:32 AM	PH3 valve closed
12/20/2010	11:35:32 AM	SiCl4 pre valve closed
12/20/2010	11:35:32 AM	SiCl4 post valve closed
12/20/2010	11:35:32 AM	Bubbler valve closed
12/20/2010	11:35:32 AM	Main Vac valve opened
12/20/2010	11:35:32 AM	Bypass valve opened
12/20/2010	11:35:32 AM	Helium MFC set to  0.000000
12/20/2010	11:35:32 AM	H2 MFC set to  0.000000
12/20/2010	11:35:32 AM	BCl3 MFC set to  0.000000
12/20/2010	11:35:32 AM	PHl3 MFC set to  0.000000
12/20/2010	11:35:32 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:35:32 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:35:32 AM	Tube furnace set to 0
12/20/2010	11:36:32 AM	H2 valve closed
12/20/2010	11:36:32 AM	BCl3 valve closed
12/20/2010	11:36:32 AM	PH3 valve closed
12/20/2010	11:36:32 AM	SiCl4 pre valve closed
12/20/2010	11:36:32 AM	SiCl4 post valve closed
12/20/2010	11:36:32 AM	Bubbler valve closed
12/20/2010	11:36:32 AM	Helium valve opened
12/20/2010	11:36:32 AM	Main Vac valve opened
12/20/2010	11:36:32 AM	Bypass valve opened
12/20/2010	11:36:32 AM	Helium MFC set to  100.000000
12/20/2010	11:36:32 AM	H2 MFC set to  0.000000
12/20/2010	11:36:32 AM	BCl3 MFC set to  0.000000
12/20/2010	11:36:32 AM	PHl3 MFC set to  0.000000
12/20/2010	11:36:32 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:36:32 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:36:32 AM	Tube furnace set to 0
12/20/2010	11:37:32 AM	Helium valve closed
12/20/2010	11:37:32 AM	H2 valve closed
12/20/2010	11:37:32 AM	BCl3 valve closed
12/20/2010	11:37:32 AM	PH3 valve closed
12/20/2010	11:37:32 AM	SiCl4 pre valve closed
12/20/2010	11:37:32 AM	SiCl4 post valve closed
12/20/2010	11:37:32 AM	Bubbler valve closed
12/20/2010	11:37:32 AM	Main Vac valve opened
12/20/2010	11:37:32 AM	Bypass valve opened
12/20/2010	11:37:32 AM	Helium MFC set to  0.000000
12/20/2010	11:37:32 AM	H2 MFC set to  0.000000
12/20/2010	11:37:32 AM	BCl3 MFC set to  0.000000
12/20/2010	11:37:32 AM	PHl3 MFC set to  0.000000
12/20/2010	11:37:32 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:37:32 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:37:33 AM	Tube furnace set to 0
12/20/2010	11:37:34 AM	Run finished at 11:37 AM
12/20/2010	11:37:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/20/2010	11:40:50 AM	Helium MFC set to  50.000000
12/20/2010	11:40:51 AM	Helium valve opened
12/20/2010	11:40:55 AM	Tube furnace set to 100
12/20/2010	11:43:02 AM	Helium MFC set to  0.000000
12/20/2010	11:43:03 AM	Helium valve closed
12/20/2010	11:50:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/20/2010	11:50:21 AM	Recipe started at 11:50 AM
12/20/2010	11:50:21 AM	Helium valve closed
12/20/2010	11:50:21 AM	H2 valve closed
12/20/2010	11:50:21 AM	BCl3 valve closed
12/20/2010	11:50:21 AM	PH3 valve closed
12/20/2010	11:50:21 AM	SiCl4 pre valve closed
12/20/2010	11:50:21 AM	SiCl4 post valve closed
12/20/2010	11:50:21 AM	Main Vac valve closed
12/20/2010	11:50:21 AM	Bubbler valve closed
12/20/2010	11:50:21 AM	Bypass valve opened
12/20/2010	11:50:21 AM	Helium MFC set to  0.000000
12/20/2010	11:50:21 AM	H2 MFC set to  0.000000
12/20/2010	11:50:21 AM	BCl3 MFC set to  0.000000
12/20/2010	11:50:21 AM	PHl3 MFC set to  0.000000
12/20/2010	11:50:21 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:50:21 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:50:22 AM	Tube furnace set to 0
12/20/2010	11:50:22 AM	Helium valve closed
12/20/2010	11:50:22 AM	H2 valve closed
12/20/2010	11:50:22 AM	BCl3 valve closed
12/20/2010	11:50:22 AM	PH3 valve closed
12/20/2010	11:50:22 AM	SiCl4 pre valve closed
12/20/2010	11:50:22 AM	SiCl4 post valve closed
12/20/2010	11:50:22 AM	Bubbler valve closed
12/20/2010	11:50:22 AM	Main Vac valve opened
12/20/2010	11:50:22 AM	Bypass valve opened
12/20/2010	11:50:22 AM	Helium MFC set to  0.000000
12/20/2010	11:50:22 AM	H2 MFC set to  0.000000
12/20/2010	11:50:22 AM	BCl3 MFC set to  0.000000
12/20/2010	11:50:22 AM	PHl3 MFC set to  0.000000
12/20/2010	11:50:22 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:50:22 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:50:22 AM	Tube furnace set to 0
12/20/2010	11:50:26 AM	H2 valve closed
12/20/2010	11:50:26 AM	BCl3 valve closed
12/20/2010	11:50:26 AM	PH3 valve closed
12/20/2010	11:50:26 AM	SiCl4 pre valve closed
12/20/2010	11:50:26 AM	SiCl4 post valve closed
12/20/2010	11:50:26 AM	Bubbler valve closed
12/20/2010	11:50:26 AM	Helium valve opened
12/20/2010	11:50:26 AM	Main Vac valve opened
12/20/2010	11:50:26 AM	Bypass valve opened
12/20/2010	11:50:26 AM	Helium MFC set to  100.000000
12/20/2010	11:50:26 AM	H2 MFC set to  0.000000
12/20/2010	11:50:26 AM	BCl3 MFC set to  0.000000
12/20/2010	11:50:26 AM	PHl3 MFC set to  0.000000
12/20/2010	11:50:26 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:50:26 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:50:26 AM	Tube furnace set to 0
12/20/2010	11:51:26 AM	Helium valve closed
12/20/2010	11:51:26 AM	H2 valve closed
12/20/2010	11:51:26 AM	BCl3 valve closed
12/20/2010	11:51:26 AM	PH3 valve closed
12/20/2010	11:51:26 AM	SiCl4 pre valve closed
12/20/2010	11:51:26 AM	SiCl4 post valve closed
12/20/2010	11:51:26 AM	Bubbler valve closed
12/20/2010	11:51:26 AM	Main Vac valve opened
12/20/2010	11:51:26 AM	Bypass valve opened
12/20/2010	11:51:26 AM	Helium MFC set to  0.000000
12/20/2010	11:51:26 AM	H2 MFC set to  0.000000
12/20/2010	11:51:26 AM	BCl3 MFC set to  0.000000
12/20/2010	11:51:26 AM	PHl3 MFC set to  0.000000
12/20/2010	11:51:26 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:51:26 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:51:26 AM	Tube furnace set to 0
12/20/2010	11:52:26 AM	H2 valve closed
12/20/2010	11:52:26 AM	BCl3 valve closed
12/20/2010	11:52:26 AM	PH3 valve closed
12/20/2010	11:52:26 AM	SiCl4 pre valve closed
12/20/2010	11:52:26 AM	SiCl4 post valve closed
12/20/2010	11:52:26 AM	Bubbler valve closed
12/20/2010	11:52:26 AM	Helium valve opened
12/20/2010	11:52:26 AM	Main Vac valve opened
12/20/2010	11:52:26 AM	Bypass valve opened
12/20/2010	11:52:26 AM	Helium MFC set to  100.000000
12/20/2010	11:52:26 AM	H2 MFC set to  0.000000
12/20/2010	11:52:26 AM	BCl3 MFC set to  0.000000
12/20/2010	11:52:26 AM	PHl3 MFC set to  0.000000
12/20/2010	11:52:26 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:52:26 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:52:26 AM	Tube furnace set to 0
12/20/2010	11:53:26 AM	Helium valve closed
12/20/2010	11:53:26 AM	H2 valve closed
12/20/2010	11:53:26 AM	BCl3 valve closed
12/20/2010	11:53:26 AM	PH3 valve closed
12/20/2010	11:53:26 AM	SiCl4 pre valve closed
12/20/2010	11:53:26 AM	SiCl4 post valve closed
12/20/2010	11:53:26 AM	Bubbler valve closed
12/20/2010	11:53:26 AM	Main Vac valve opened
12/20/2010	11:53:26 AM	Bypass valve opened
12/20/2010	11:53:26 AM	Helium MFC set to  0.000000
12/20/2010	11:53:26 AM	H2 MFC set to  0.000000
12/20/2010	11:53:26 AM	BCl3 MFC set to  0.000000
12/20/2010	11:53:26 AM	PHl3 MFC set to  0.000000
12/20/2010	11:53:26 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:53:26 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:53:27 AM	Tube furnace set to 0
12/20/2010	11:54:27 AM	H2 valve closed
12/20/2010	11:54:27 AM	BCl3 valve closed
12/20/2010	11:54:27 AM	PH3 valve closed
12/20/2010	11:54:27 AM	SiCl4 pre valve closed
12/20/2010	11:54:27 AM	SiCl4 post valve closed
12/20/2010	11:54:27 AM	Bubbler valve closed
12/20/2010	11:54:27 AM	Helium valve opened
12/20/2010	11:54:27 AM	Main Vac valve opened
12/20/2010	11:54:27 AM	Bypass valve opened
12/20/2010	11:54:27 AM	Helium MFC set to  100.000000
12/20/2010	11:54:27 AM	H2 MFC set to  0.000000
12/20/2010	11:54:27 AM	BCl3 MFC set to  0.000000
12/20/2010	11:54:27 AM	PHl3 MFC set to  0.000000
12/20/2010	11:54:27 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:54:27 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:54:27 AM	Tube furnace set to 0
12/20/2010	11:55:27 AM	Helium valve closed
12/20/2010	11:55:27 AM	H2 valve closed
12/20/2010	11:55:27 AM	BCl3 valve closed
12/20/2010	11:55:27 AM	PH3 valve closed
12/20/2010	11:55:27 AM	SiCl4 pre valve closed
12/20/2010	11:55:27 AM	SiCl4 post valve closed
12/20/2010	11:55:27 AM	Bubbler valve closed
12/20/2010	11:55:27 AM	Main Vac valve opened
12/20/2010	11:55:27 AM	Bypass valve opened
12/20/2010	11:55:27 AM	Helium MFC set to  0.000000
12/20/2010	11:55:27 AM	H2 MFC set to  0.000000
12/20/2010	11:55:27 AM	BCl3 MFC set to  0.000000
12/20/2010	11:55:27 AM	PHl3 MFC set to  0.000000
12/20/2010	11:55:27 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:55:27 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:55:27 AM	Tube furnace set to 0
12/20/2010	11:56:27 AM	H2 valve closed
12/20/2010	11:56:27 AM	BCl3 valve closed
12/20/2010	11:56:27 AM	PH3 valve closed
12/20/2010	11:56:27 AM	SiCl4 pre valve closed
12/20/2010	11:56:27 AM	SiCl4 post valve closed
12/20/2010	11:56:27 AM	Bubbler valve closed
12/20/2010	11:56:27 AM	Helium valve opened
12/20/2010	11:56:27 AM	Main Vac valve opened
12/20/2010	11:56:27 AM	Bypass valve opened
12/20/2010	11:56:27 AM	Helium MFC set to  100.000000
12/20/2010	11:56:27 AM	H2 MFC set to  0.000000
12/20/2010	11:56:27 AM	BCl3 MFC set to  0.000000
12/20/2010	11:56:27 AM	PHl3 MFC set to  0.000000
12/20/2010	11:56:27 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:56:27 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:56:27 AM	Tube furnace set to 0
12/20/2010	11:57:27 AM	Helium valve closed
12/20/2010	11:57:27 AM	H2 valve closed
12/20/2010	11:57:27 AM	BCl3 valve closed
12/20/2010	11:57:27 AM	PH3 valve closed
12/20/2010	11:57:27 AM	SiCl4 pre valve closed
12/20/2010	11:57:27 AM	SiCl4 post valve closed
12/20/2010	11:57:27 AM	Bubbler valve closed
12/20/2010	11:57:27 AM	Main Vac valve opened
12/20/2010	11:57:27 AM	Bypass valve opened
12/20/2010	11:57:27 AM	Helium MFC set to  0.000000
12/20/2010	11:57:27 AM	H2 MFC set to  0.000000
12/20/2010	11:57:27 AM	BCl3 MFC set to  0.000000
12/20/2010	11:57:27 AM	PHl3 MFC set to  0.000000
12/20/2010	11:57:27 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:57:27 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:57:27 AM	Tube furnace set to 0
12/20/2010	11:58:27 AM	H2 valve closed
12/20/2010	11:58:27 AM	BCl3 valve closed
12/20/2010	11:58:27 AM	PH3 valve closed
12/20/2010	11:58:27 AM	SiCl4 pre valve closed
12/20/2010	11:58:27 AM	SiCl4 post valve closed
12/20/2010	11:58:27 AM	Bubbler valve closed
12/20/2010	11:58:27 AM	Helium valve opened
12/20/2010	11:58:27 AM	Main Vac valve opened
12/20/2010	11:58:27 AM	Bypass valve opened
12/20/2010	11:58:27 AM	Helium MFC set to  100.000000
12/20/2010	11:58:27 AM	H2 MFC set to  0.000000
12/20/2010	11:58:27 AM	BCl3 MFC set to  0.000000
12/20/2010	11:58:27 AM	PHl3 MFC set to  0.000000
12/20/2010	11:58:27 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:58:27 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:58:28 AM	Tube furnace set to 0
12/20/2010	11:59:28 AM	Helium valve closed
12/20/2010	11:59:28 AM	H2 valve closed
12/20/2010	11:59:28 AM	BCl3 valve closed
12/20/2010	11:59:28 AM	PH3 valve closed
12/20/2010	11:59:28 AM	SiCl4 pre valve closed
12/20/2010	11:59:28 AM	SiCl4 post valve closed
12/20/2010	11:59:28 AM	Bubbler valve closed
12/20/2010	11:59:28 AM	Main Vac valve opened
12/20/2010	11:59:28 AM	Bypass valve opened
12/20/2010	11:59:28 AM	Helium MFC set to  0.000000
12/20/2010	11:59:28 AM	H2 MFC set to  0.000000
12/20/2010	11:59:28 AM	BCl3 MFC set to  0.000000
12/20/2010	11:59:28 AM	PHl3 MFC set to  0.000000
12/20/2010	11:59:28 AM	SiCl4 MFC set to  0.000000
12/20/2010	11:59:28 AM	Bypass solenoid MFC set to  0.000000
12/20/2010	11:59:28 AM	Tube furnace set to 0
12/20/2010	12:00:28 PM	H2 valve closed
12/20/2010	12:00:28 PM	BCl3 valve closed
12/20/2010	12:00:28 PM	PH3 valve closed
12/20/2010	12:00:28 PM	SiCl4 pre valve closed
12/20/2010	12:00:28 PM	SiCl4 post valve closed
12/20/2010	12:00:28 PM	Bubbler valve closed
12/20/2010	12:00:28 PM	Helium valve opened
12/20/2010	12:00:28 PM	Main Vac valve opened
12/20/2010	12:00:28 PM	Bypass valve opened
12/20/2010	12:00:28 PM	Helium MFC set to  100.000000
12/20/2010	12:00:28 PM	H2 MFC set to  0.000000
12/20/2010	12:00:28 PM	BCl3 MFC set to  0.000000
12/20/2010	12:00:28 PM	PHl3 MFC set to  0.000000
12/20/2010	12:00:28 PM	SiCl4 MFC set to  0.000000
12/20/2010	12:00:28 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	12:00:28 PM	Tube furnace set to 0
12/20/2010	12:01:28 PM	Helium valve closed
12/20/2010	12:01:28 PM	H2 valve closed
12/20/2010	12:01:28 PM	BCl3 valve closed
12/20/2010	12:01:28 PM	PH3 valve closed
12/20/2010	12:01:28 PM	SiCl4 pre valve closed
12/20/2010	12:01:28 PM	SiCl4 post valve closed
12/20/2010	12:01:28 PM	Bubbler valve closed
12/20/2010	12:01:28 PM	Main Vac valve opened
12/20/2010	12:01:28 PM	Bypass valve opened
12/20/2010	12:01:28 PM	Helium MFC set to  0.000000
12/20/2010	12:01:28 PM	H2 MFC set to  0.000000
12/20/2010	12:01:28 PM	BCl3 MFC set to  0.000000
12/20/2010	12:01:28 PM	PHl3 MFC set to  0.000000
12/20/2010	12:01:28 PM	SiCl4 MFC set to  0.000000
12/20/2010	12:01:28 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	12:01:28 PM	Tube furnace set to 0
12/20/2010	12:02:28 PM	H2 valve closed
12/20/2010	12:02:28 PM	BCl3 valve closed
12/20/2010	12:02:28 PM	PH3 valve closed
12/20/2010	12:02:28 PM	SiCl4 pre valve closed
12/20/2010	12:02:28 PM	SiCl4 post valve closed
12/20/2010	12:02:28 PM	Bubbler valve closed
12/20/2010	12:02:28 PM	Helium valve opened
12/20/2010	12:02:28 PM	Main Vac valve opened
12/20/2010	12:02:28 PM	Bypass valve opened
12/20/2010	12:02:28 PM	Helium MFC set to  100.000000
12/20/2010	12:02:28 PM	H2 MFC set to  0.000000
12/20/2010	12:02:28 PM	BCl3 MFC set to  0.000000
12/20/2010	12:02:28 PM	PHl3 MFC set to  0.000000
12/20/2010	12:02:28 PM	SiCl4 MFC set to  0.000000
12/20/2010	12:02:28 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	12:02:28 PM	Tube furnace set to 0
12/20/2010	12:03:28 PM	Helium valve closed
12/20/2010	12:03:28 PM	H2 valve closed
12/20/2010	12:03:28 PM	BCl3 valve closed
12/20/2010	12:03:28 PM	PH3 valve closed
12/20/2010	12:03:28 PM	SiCl4 pre valve closed
12/20/2010	12:03:28 PM	SiCl4 post valve closed
12/20/2010	12:03:28 PM	Bubbler valve closed
12/20/2010	12:03:28 PM	Main Vac valve opened
12/20/2010	12:03:28 PM	Bypass valve opened
12/20/2010	12:03:28 PM	Helium MFC set to  0.000000
12/20/2010	12:03:28 PM	H2 MFC set to  0.000000
12/20/2010	12:03:28 PM	BCl3 MFC set to  0.000000
12/20/2010	12:03:28 PM	PHl3 MFC set to  0.000000
12/20/2010	12:03:28 PM	SiCl4 MFC set to  0.000000
12/20/2010	12:03:28 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	12:03:29 PM	Tube furnace set to 0
12/20/2010	12:04:29 PM	H2 valve closed
12/20/2010	12:04:29 PM	BCl3 valve closed
12/20/2010	12:04:29 PM	PH3 valve closed
12/20/2010	12:04:29 PM	SiCl4 pre valve closed
12/20/2010	12:04:29 PM	SiCl4 post valve closed
12/20/2010	12:04:29 PM	Bubbler valve closed
12/20/2010	12:04:29 PM	Helium valve opened
12/20/2010	12:04:29 PM	Main Vac valve opened
12/20/2010	12:04:29 PM	Bypass valve opened
12/20/2010	12:04:29 PM	Helium MFC set to  100.000000
12/20/2010	12:04:29 PM	H2 MFC set to  0.000000
12/20/2010	12:04:29 PM	BCl3 MFC set to  0.000000
12/20/2010	12:04:29 PM	PHl3 MFC set to  0.000000
12/20/2010	12:04:29 PM	SiCl4 MFC set to  0.000000
12/20/2010	12:04:29 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	12:04:29 PM	Tube furnace set to 0
12/20/2010	12:05:29 PM	Helium valve closed
12/20/2010	12:05:29 PM	H2 valve closed
12/20/2010	12:05:29 PM	BCl3 valve closed
12/20/2010	12:05:29 PM	PH3 valve closed
12/20/2010	12:05:29 PM	SiCl4 pre valve closed
12/20/2010	12:05:29 PM	SiCl4 post valve closed
12/20/2010	12:05:29 PM	Bubbler valve closed
12/20/2010	12:05:29 PM	Main Vac valve opened
12/20/2010	12:05:29 PM	Bypass valve opened
12/20/2010	12:05:29 PM	Helium MFC set to  0.000000
12/20/2010	12:05:29 PM	H2 MFC set to  0.000000
12/20/2010	12:05:29 PM	BCl3 MFC set to  0.000000
12/20/2010	12:05:29 PM	PHl3 MFC set to  0.000000
12/20/2010	12:05:29 PM	SiCl4 MFC set to  0.000000
12/20/2010	12:05:29 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	12:05:29 PM	Tube furnace set to 0
12/20/2010	12:06:29 PM	H2 valve closed
12/20/2010	12:06:29 PM	BCl3 valve closed
12/20/2010	12:06:29 PM	PH3 valve closed
12/20/2010	12:06:29 PM	SiCl4 pre valve closed
12/20/2010	12:06:29 PM	SiCl4 post valve closed
12/20/2010	12:06:29 PM	Bubbler valve closed
12/20/2010	12:06:29 PM	Helium valve opened
12/20/2010	12:06:29 PM	Main Vac valve opened
12/20/2010	12:06:29 PM	Bypass valve opened
12/20/2010	12:06:29 PM	Helium MFC set to  100.000000
12/20/2010	12:06:29 PM	H2 MFC set to  0.000000
12/20/2010	12:06:29 PM	BCl3 MFC set to  0.000000
12/20/2010	12:06:29 PM	PHl3 MFC set to  0.000000
12/20/2010	12:06:29 PM	SiCl4 MFC set to  0.000000
12/20/2010	12:06:29 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	12:06:29 PM	Tube furnace set to 0
12/20/2010	12:06:31 PM	Helium valve closed
12/20/2010	12:06:31 PM	H2 valve closed
12/20/2010	12:06:31 PM	BCl3 valve closed
12/20/2010	12:06:31 PM	PH3 valve closed
12/20/2010	12:06:31 PM	SiCl4 pre valve closed
12/20/2010	12:06:31 PM	SiCl4 post valve closed
12/20/2010	12:06:31 PM	Bubbler valve closed
12/20/2010	12:06:31 PM	Main Vac valve opened
12/20/2010	12:06:31 PM	Bypass valve opened
12/20/2010	12:06:31 PM	Helium MFC set to  0.000000
12/20/2010	12:06:31 PM	H2 MFC set to  0.000000
12/20/2010	12:06:31 PM	BCl3 MFC set to  0.000000
12/20/2010	12:06:31 PM	PHl3 MFC set to  0.000000
12/20/2010	12:06:31 PM	SiCl4 MFC set to  0.000000
12/20/2010	12:06:31 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	12:06:31 PM	Tube furnace set to 0
12/20/2010	12:07:31 PM	H2 valve closed
12/20/2010	12:07:31 PM	BCl3 valve closed
12/20/2010	12:07:31 PM	PH3 valve closed
12/20/2010	12:07:31 PM	SiCl4 pre valve closed
12/20/2010	12:07:31 PM	SiCl4 post valve closed
12/20/2010	12:07:31 PM	Bubbler valve closed
12/20/2010	12:07:31 PM	Helium valve opened
12/20/2010	12:07:31 PM	Main Vac valve opened
12/20/2010	12:07:31 PM	Bypass valve opened
12/20/2010	12:07:31 PM	Helium MFC set to  100.000000
12/20/2010	12:07:31 PM	H2 MFC set to  0.000000
12/20/2010	12:07:31 PM	BCl3 MFC set to  0.000000
12/20/2010	12:07:31 PM	PHl3 MFC set to  0.000000
12/20/2010	12:07:31 PM	SiCl4 MFC set to  0.000000
12/20/2010	12:07:31 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	12:07:31 PM	Tube furnace set to 0
12/20/2010	12:08:31 PM	Helium valve closed
12/20/2010	12:08:31 PM	H2 valve closed
12/20/2010	12:08:31 PM	BCl3 valve closed
12/20/2010	12:08:31 PM	PH3 valve closed
12/20/2010	12:08:31 PM	SiCl4 pre valve closed
12/20/2010	12:08:31 PM	SiCl4 post valve closed
12/20/2010	12:08:31 PM	Bubbler valve closed
12/20/2010	12:08:31 PM	Main Vac valve opened
12/20/2010	12:08:31 PM	Bypass valve opened
12/20/2010	12:08:31 PM	Helium MFC set to  0.000000
12/20/2010	12:08:31 PM	H2 MFC set to  0.000000
12/20/2010	12:08:31 PM	BCl3 MFC set to  0.000000
12/20/2010	12:08:31 PM	PHl3 MFC set to  0.000000
12/20/2010	12:08:31 PM	SiCl4 MFC set to  0.000000
12/20/2010	12:08:31 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	12:08:32 PM	Tube furnace set to 0
12/20/2010	12:08:33 PM	Run finished at 12:08 PM
12/20/2010	12:08:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/20/2010	1:09:44 PM	Helium MFC set to  100.000000
12/20/2010	1:09:45 PM	Helium valve opened
12/20/2010	1:10:28 PM	Helium MFC set to  0.000000
12/20/2010	1:10:29 PM	Helium valve closed
12/20/2010	1:10:34 PM	Tube furnace set to 100
12/20/2010	1:11:23 PM	Helium MFC set to  60.000000
12/20/2010	1:11:24 PM	Helium valve opened
12/20/2010	1:11:44 PM	Helium MFC set to  0.000000
12/20/2010	1:11:45 PM	Helium valve closed
12/20/2010	1:16:58 PM	Tube furnace set to 0
12/20/2010	1:17:02 PM	Helium MFC set to  50.000000
12/20/2010	1:17:03 PM	Helium valve opened
12/20/2010	1:39:11 PM	Helium MFC set to  0.000000
12/20/2010	1:39:12 PM	Helium valve closed
12/20/2010	1:39:56 PM	Main Vac valve closed
12/20/2010	1:39:58 PM	Bypass valve closed
12/20/2010	1:40:09 PM	Bypass valve opened
12/20/2010	1:40:10 PM	Main Vac valve opened
12/20/2010	1:40:28 PM	Helium MFC set to  10.000000
12/20/2010	1:40:29 PM	Helium valve opened
12/20/2010	1:41:58 PM	Helium MFC set to  0.000000
12/20/2010	1:41:58 PM	Helium valve closed
12/20/2010	1:42:36 PM	Tube furnace set to 150
12/20/2010	1:43:07 PM	Recipe started at 1:43 PM
12/20/2010	1:43:07 PM	Helium valve closed
12/20/2010	1:43:07 PM	BCl3 valve closed
12/20/2010	1:43:07 PM	PH3 valve closed
12/20/2010	1:43:07 PM	SiCl4 pre valve closed
12/20/2010	1:43:07 PM	SiCl4 post valve closed
12/20/2010	1:43:07 PM	Main Vac valve closed
12/20/2010	1:43:07 PM	Bypass valve closed
12/20/2010	1:43:07 PM	Bubbler valve closed
12/20/2010	1:43:07 PM	H2 valve opened
12/20/2010	1:43:07 PM	Helium MFC set to  0.000000
12/20/2010	1:43:07 PM	H2 MFC set to  500.000000
12/20/2010	1:43:07 PM	BCl3 MFC set to  0.000000
12/20/2010	1:43:07 PM	PHl3 MFC set to  0.000000
12/20/2010	1:43:07 PM	SiCl4 MFC set to  0.000000
12/20/2010	1:43:07 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	1:43:07 PM	Tube furnace set to 200
12/20/2010	1:43:51 PM	Run aborted at 1:43 PM
12/20/2010	1:43:51 PM	Helium valve closed
12/20/2010	1:43:51 PM	H2 valve closed
12/20/2010	1:43:51 PM	BCl3 valve closed
12/20/2010	1:43:51 PM	PH3 valve closed
12/20/2010	1:43:51 PM	SiCl4 pre valve closed
12/20/2010	1:43:51 PM	SiCl4 post valve closed
12/20/2010	1:43:51 PM	Bypass valve closed
12/20/2010	1:43:51 PM	Main Vac valve closed
12/20/2010	1:43:51 PM	Bubbler valve closed
12/20/2010	1:43:51 PM	Helium MFC set to  0.000000
12/20/2010	1:43:51 PM	H2 MFC set to  0.000000
12/20/2010	1:43:51 PM	BCl3 MFC set to  0.000000
12/20/2010	1:43:51 PM	PHl3 MFC set to  0.000000
12/20/2010	1:43:51 PM	SiCl4 MFC set to  0.000000
12/20/2010	1:43:51 PM	Tube furnace set to 0
12/20/2010	1:47:18 PM	Recipe started at 1:47 PM
12/20/2010	1:47:18 PM	Helium valve closed
12/20/2010	1:47:18 PM	BCl3 valve closed
12/20/2010	1:47:18 PM	PH3 valve closed
12/20/2010	1:47:18 PM	SiCl4 pre valve closed
12/20/2010	1:47:18 PM	SiCl4 post valve closed
12/20/2010	1:47:18 PM	Main Vac valve closed
12/20/2010	1:47:18 PM	Bypass valve closed
12/20/2010	1:47:18 PM	Bubbler valve closed
12/20/2010	1:47:18 PM	H2 valve opened
12/20/2010	1:47:18 PM	Helium MFC set to  0.000000
12/20/2010	1:47:18 PM	H2 MFC set to  500.000000
12/20/2010	1:47:18 PM	BCl3 MFC set to  0.000000
12/20/2010	1:47:18 PM	PHl3 MFC set to  0.000000
12/20/2010	1:47:18 PM	SiCl4 MFC set to  0.000000
12/20/2010	1:47:18 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	1:47:18 PM	Tube furnace set to 200
12/20/2010	1:48:29 PM	Helium valve closed
12/20/2010	1:48:29 PM	BCl3 valve closed
12/20/2010	1:48:29 PM	PH3 valve closed
12/20/2010	1:48:29 PM	SiCl4 pre valve closed
12/20/2010	1:48:29 PM	SiCl4 post valve closed
12/20/2010	1:48:29 PM	Main Vac valve closed
12/20/2010	1:48:29 PM	Bypass valve closed
12/20/2010	1:48:29 PM	H2 valve opened
12/20/2010	1:48:29 PM	Bubbler valve opened
12/20/2010	1:48:29 PM	Helium MFC set to  0.000000
12/20/2010	1:48:29 PM	H2 MFC set to  400.000000
12/20/2010	1:48:29 PM	BCl3 MFC set to  0.000000
12/20/2010	1:48:29 PM	PHl3 MFC set to  0.000000
12/20/2010	1:48:29 PM	SiCl4 MFC set to  0.000000
12/20/2010	1:48:29 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	1:48:29 PM	Tube furnace set to 1001
12/20/2010	2:09:29 PM	Helium valve closed
12/20/2010	2:09:29 PM	BCl3 valve closed
12/20/2010	2:09:29 PM	PH3 valve closed
12/20/2010	2:09:29 PM	Main Vac valve closed
12/20/2010	2:09:29 PM	Bypass valve closed
12/20/2010	2:09:29 PM	H2 valve opened
12/20/2010	2:09:29 PM	SiCl4 pre valve opened
12/20/2010	2:09:29 PM	SiCl4 post valve opened
12/20/2010	2:09:29 PM	Bubbler valve opened
12/20/2010	2:09:29 PM	Helium MFC set to  0.000000
12/20/2010	2:09:29 PM	H2 MFC set to  400.000000
12/20/2010	2:09:29 PM	BCl3 MFC set to  0.000000
12/20/2010	2:09:29 PM	PHl3 MFC set to  0.000000
12/20/2010	2:09:29 PM	SiCl4 MFC set to  50.000000
12/20/2010	2:09:29 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	2:09:29 PM	Tube furnace set to 1000
12/20/2010	2:09:39 PM	Helium valve closed
12/20/2010	2:09:39 PM	PH3 valve closed
12/20/2010	2:09:39 PM	Main Vac valve closed
12/20/2010	2:09:39 PM	Bypass valve closed
12/20/2010	2:09:39 PM	H2 valve opened
12/20/2010	2:09:39 PM	BCl3 valve opened
12/20/2010	2:09:39 PM	SiCl4 pre valve opened
12/20/2010	2:09:39 PM	SiCl4 post valve opened
12/20/2010	2:09:39 PM	Bubbler valve opened
12/20/2010	2:09:39 PM	Helium MFC set to  0.000000
12/20/2010	2:09:39 PM	H2 MFC set to  500.000000
12/20/2010	2:09:39 PM	BCl3 MFC set to  12.000000
12/20/2010	2:09:39 PM	PHl3 MFC set to  0.000000
12/20/2010	2:09:39 PM	SiCl4 MFC set to  50.000000
12/20/2010	2:09:39 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	2:09:40 PM	Tube furnace set to 1000
12/20/2010	2:24:40 PM	H2 valve closed
12/20/2010	2:24:40 PM	BCl3 valve closed
12/20/2010	2:24:40 PM	PH3 valve closed
12/20/2010	2:24:40 PM	SiCl4 pre valve closed
12/20/2010	2:24:40 PM	SiCl4 post valve closed
12/20/2010	2:24:40 PM	Main Vac valve closed
12/20/2010	2:24:40 PM	Bypass valve closed
12/20/2010	2:24:40 PM	Helium valve opened
12/20/2010	2:24:40 PM	Bubbler valve opened
12/20/2010	2:24:40 PM	Helium MFC set to  400.000000
12/20/2010	2:24:40 PM	H2 MFC set to  0.000000
12/20/2010	2:24:40 PM	BCl3 MFC set to  0.000000
12/20/2010	2:24:40 PM	PHl3 MFC set to  0.000000
12/20/2010	2:24:40 PM	SiCl4 MFC set to  0.000000
12/20/2010	2:24:40 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	2:24:40 PM	Tube furnace set to 0
12/20/2010	2:44:40 PM	Helium valve closed
12/20/2010	2:44:40 PM	H2 valve closed
12/20/2010	2:44:40 PM	BCl3 valve closed
12/20/2010	2:44:40 PM	PH3 valve closed
12/20/2010	2:44:40 PM	SiCl4 pre valve closed
12/20/2010	2:44:40 PM	SiCl4 post valve closed
12/20/2010	2:44:40 PM	Main Vac valve closed
12/20/2010	2:44:40 PM	Bypass valve closed
12/20/2010	2:44:40 PM	Bubbler valve closed
12/20/2010	2:44:40 PM	Helium MFC set to  0.000000
12/20/2010	2:44:40 PM	H2 MFC set to  0.000000
12/20/2010	2:44:40 PM	BCl3 MFC set to  0.000000
12/20/2010	2:44:40 PM	PHl3 MFC set to  0.000000
12/20/2010	2:44:40 PM	SiCl4 MFC set to  0.000000
12/20/2010	2:44:40 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	2:44:40 PM	Tube furnace set to 0
12/20/2010	2:44:40 PM	Run finished at 2:44 PM
12/20/2010	2:45:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2010	2:45:10 PM	Recipe started at 2:45 PM
12/20/2010	2:45:10 PM	Helium valve closed
12/20/2010	2:45:10 PM	H2 valve closed
12/20/2010	2:45:10 PM	BCl3 valve closed
12/20/2010	2:45:11 PM	PH3 valve closed
12/20/2010	2:45:11 PM	SiCl4 pre valve closed
12/20/2010	2:45:11 PM	SiCl4 post valve closed
12/20/2010	2:45:11 PM	Main Vac valve closed
12/20/2010	2:45:11 PM	Bubbler valve closed
12/20/2010	2:45:11 PM	Bypass valve opened
12/20/2010	2:45:11 PM	Helium MFC set to  0.000000
12/20/2010	2:45:11 PM	H2 MFC set to  0.000000
12/20/2010	2:45:11 PM	BCl3 MFC set to  0.000000
12/20/2010	2:45:11 PM	PHl3 MFC set to  0.000000
12/20/2010	2:45:11 PM	SiCl4 MFC set to  0.000000
12/20/2010	2:45:11 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	2:45:11 PM	Tube furnace set to 0
12/20/2010	2:45:25 PM	Helium valve closed
12/20/2010	2:45:25 PM	H2 valve closed
12/20/2010	2:45:25 PM	BCl3 valve closed
12/20/2010	2:45:25 PM	PH3 valve closed
12/20/2010	2:45:25 PM	SiCl4 pre valve closed
12/20/2010	2:45:25 PM	SiCl4 post valve closed
12/20/2010	2:45:25 PM	Bubbler valve closed
12/20/2010	2:45:25 PM	Main Vac valve opened
12/20/2010	2:45:25 PM	Bypass valve opened
12/20/2010	2:45:25 PM	Helium MFC set to  0.000000
12/20/2010	2:45:25 PM	H2 MFC set to  0.000000
12/20/2010	2:45:25 PM	BCl3 MFC set to  0.000000
12/20/2010	2:45:25 PM	PHl3 MFC set to  0.000000
12/20/2010	2:45:25 PM	SiCl4 MFC set to  0.000000
12/20/2010	2:45:25 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	2:45:25 PM	Tube furnace set to 0
12/20/2010	2:45:25 PM	Run finished at 2:45 PM
12/20/2010	2:45:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2010	2:45:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/20/2010	2:45:29 PM	Recipe started at 2:45 PM
12/20/2010	2:45:29 PM	H2 valve closed
12/20/2010	2:45:29 PM	BCl3 valve closed
12/20/2010	2:45:29 PM	PH3 valve closed
12/20/2010	2:45:29 PM	SiCl4 pre valve closed
12/20/2010	2:45:29 PM	SiCl4 post valve closed
12/20/2010	2:45:29 PM	Main Vac valve closed
12/20/2010	2:45:29 PM	Bypass valve closed
12/20/2010	2:45:29 PM	Bubbler valve closed
12/20/2010	2:45:29 PM	Helium valve opened
12/20/2010	2:45:29 PM	Helium MFC set to  500.000000
12/20/2010	2:45:29 PM	H2 MFC set to  0.000000
12/20/2010	2:45:29 PM	BCl3 MFC set to  0.000000
12/20/2010	2:45:29 PM	PHl3 MFC set to  0.000000
12/20/2010	2:45:29 PM	SiCl4 MFC set to  0.000000
12/20/2010	2:45:29 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	2:45:30 PM	Tube furnace set to 0
12/20/2010	2:46:43 PM	Helium valve closed
12/20/2010	2:46:43 PM	H2 valve closed
12/20/2010	2:46:43 PM	BCl3 valve closed
12/20/2010	2:46:43 PM	PH3 valve closed
12/20/2010	2:46:43 PM	SiCl4 pre valve closed
12/20/2010	2:46:43 PM	SiCl4 post valve closed
12/20/2010	2:46:43 PM	Main Vac valve closed
12/20/2010	2:46:43 PM	Bypass valve closed
12/20/2010	2:46:43 PM	Bubbler valve closed
12/20/2010	2:46:43 PM	Helium MFC set to  0.000000
12/20/2010	2:46:43 PM	H2 MFC set to  0.000000
12/20/2010	2:46:43 PM	BCl3 MFC set to  0.000000
12/20/2010	2:46:43 PM	PHl3 MFC set to  0.000000
12/20/2010	2:46:43 PM	SiCl4 MFC set to  0.000000
12/20/2010	2:46:43 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	2:46:43 PM	Tube furnace set to 0
12/20/2010	2:46:44 PM	Run finished at 2:46 PM
12/20/2010	2:46:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/20/2010	2:49:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/20/2010	2:50:11 PM	Recipe started at 2:50 PM
12/20/2010	2:50:11 PM	Helium valve closed
12/20/2010	2:50:11 PM	H2 valve closed
12/20/2010	2:50:11 PM	BCl3 valve closed
12/20/2010	2:50:11 PM	PH3 valve closed
12/20/2010	2:50:11 PM	SiCl4 pre valve closed
12/20/2010	2:50:11 PM	SiCl4 post valve closed
12/20/2010	2:50:11 PM	Main Vac valve closed
12/20/2010	2:50:11 PM	Bubbler valve closed
12/20/2010	2:50:11 PM	Bypass valve opened
12/20/2010	2:50:11 PM	Helium MFC set to  0.000000
12/20/2010	2:50:11 PM	H2 MFC set to  0.000000
12/20/2010	2:50:11 PM	BCl3 MFC set to  0.000000
12/20/2010	2:50:11 PM	PHl3 MFC set to  0.000000
12/20/2010	2:50:11 PM	SiCl4 MFC set to  0.000000
12/20/2010	2:50:11 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	2:50:11 PM	Tube furnace set to 0
12/20/2010	2:51:05 PM	Helium valve closed
12/20/2010	2:51:05 PM	H2 valve closed
12/20/2010	2:51:05 PM	BCl3 valve closed
12/20/2010	2:51:05 PM	PH3 valve closed
12/20/2010	2:51:05 PM	SiCl4 pre valve closed
12/20/2010	2:51:05 PM	SiCl4 post valve closed
12/20/2010	2:51:05 PM	Bubbler valve closed
12/20/2010	2:51:05 PM	Main Vac valve opened
12/20/2010	2:51:05 PM	Bypass valve opened
12/20/2010	2:51:05 PM	Helium MFC set to  0.000000
12/20/2010	2:51:05 PM	H2 MFC set to  0.000000
12/20/2010	2:51:05 PM	BCl3 MFC set to  0.000000
12/20/2010	2:51:05 PM	PHl3 MFC set to  0.000000
12/20/2010	2:51:05 PM	SiCl4 MFC set to  0.000000
12/20/2010	2:51:05 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	2:51:05 PM	Tube furnace set to 0
12/20/2010	2:52:05 PM	H2 valve closed
12/20/2010	2:52:05 PM	BCl3 valve closed
12/20/2010	2:52:05 PM	PH3 valve closed
12/20/2010	2:52:05 PM	SiCl4 pre valve closed
12/20/2010	2:52:05 PM	SiCl4 post valve closed
12/20/2010	2:52:05 PM	Bubbler valve closed
12/20/2010	2:52:05 PM	Helium valve opened
12/20/2010	2:52:05 PM	Main Vac valve opened
12/20/2010	2:52:05 PM	Bypass valve opened
12/20/2010	2:52:05 PM	Helium MFC set to  100.000000
12/20/2010	2:52:05 PM	H2 MFC set to  0.000000
12/20/2010	2:52:05 PM	BCl3 MFC set to  0.000000
12/20/2010	2:52:05 PM	PHl3 MFC set to  0.000000
12/20/2010	2:52:05 PM	SiCl4 MFC set to  0.000000
12/20/2010	2:52:05 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	2:52:06 PM	Tube furnace set to 0
12/20/2010	2:53:06 PM	Helium valve closed
12/20/2010	2:53:06 PM	H2 valve closed
12/20/2010	2:53:06 PM	BCl3 valve closed
12/20/2010	2:53:06 PM	PH3 valve closed
12/20/2010	2:53:06 PM	SiCl4 pre valve closed
12/20/2010	2:53:06 PM	SiCl4 post valve closed
12/20/2010	2:53:06 PM	Bubbler valve closed
12/20/2010	2:53:06 PM	Main Vac valve opened
12/20/2010	2:53:06 PM	Bypass valve opened
12/20/2010	2:53:06 PM	Helium MFC set to  0.000000
12/20/2010	2:53:06 PM	H2 MFC set to  0.000000
12/20/2010	2:53:06 PM	BCl3 MFC set to  0.000000
12/20/2010	2:53:06 PM	PHl3 MFC set to  0.000000
12/20/2010	2:53:06 PM	SiCl4 MFC set to  0.000000
12/20/2010	2:53:06 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	2:53:06 PM	Tube furnace set to 0
12/20/2010	2:54:06 PM	H2 valve closed
12/20/2010	2:54:06 PM	BCl3 valve closed
12/20/2010	2:54:06 PM	PH3 valve closed
12/20/2010	2:54:06 PM	SiCl4 pre valve closed
12/20/2010	2:54:06 PM	SiCl4 post valve closed
12/20/2010	2:54:06 PM	Bubbler valve closed
12/20/2010	2:54:06 PM	Helium valve opened
12/20/2010	2:54:06 PM	Main Vac valve opened
12/20/2010	2:54:06 PM	Bypass valve opened
12/20/2010	2:54:06 PM	Helium MFC set to  100.000000
12/20/2010	2:54:06 PM	H2 MFC set to  0.000000
12/20/2010	2:54:06 PM	BCl3 MFC set to  0.000000
12/20/2010	2:54:06 PM	PHl3 MFC set to  0.000000
12/20/2010	2:54:06 PM	SiCl4 MFC set to  0.000000
12/20/2010	2:54:06 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	2:54:06 PM	Tube furnace set to 0
12/20/2010	2:55:06 PM	Helium valve closed
12/20/2010	2:55:06 PM	H2 valve closed
12/20/2010	2:55:06 PM	BCl3 valve closed
12/20/2010	2:55:06 PM	PH3 valve closed
12/20/2010	2:55:06 PM	SiCl4 pre valve closed
12/20/2010	2:55:06 PM	SiCl4 post valve closed
12/20/2010	2:55:06 PM	Bubbler valve closed
12/20/2010	2:55:06 PM	Main Vac valve opened
12/20/2010	2:55:06 PM	Bypass valve opened
12/20/2010	2:55:06 PM	Helium MFC set to  0.000000
12/20/2010	2:55:06 PM	H2 MFC set to  0.000000
12/20/2010	2:55:06 PM	BCl3 MFC set to  0.000000
12/20/2010	2:55:06 PM	PHl3 MFC set to  0.000000
12/20/2010	2:55:06 PM	SiCl4 MFC set to  0.000000
12/20/2010	2:55:06 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	2:55:06 PM	Tube furnace set to 0
12/20/2010	2:56:06 PM	H2 valve closed
12/20/2010	2:56:06 PM	BCl3 valve closed
12/20/2010	2:56:06 PM	PH3 valve closed
12/20/2010	2:56:06 PM	SiCl4 pre valve closed
12/20/2010	2:56:06 PM	SiCl4 post valve closed
12/20/2010	2:56:06 PM	Bubbler valve closed
12/20/2010	2:56:06 PM	Helium valve opened
12/20/2010	2:56:06 PM	Main Vac valve opened
12/20/2010	2:56:06 PM	Bypass valve opened
12/20/2010	2:56:06 PM	Helium MFC set to  100.000000
12/20/2010	2:56:06 PM	H2 MFC set to  0.000000
12/20/2010	2:56:06 PM	BCl3 MFC set to  0.000000
12/20/2010	2:56:06 PM	PHl3 MFC set to  0.000000
12/20/2010	2:56:06 PM	SiCl4 MFC set to  0.000000
12/20/2010	2:56:06 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	2:56:06 PM	Tube furnace set to 0
12/20/2010	2:57:06 PM	Helium valve closed
12/20/2010	2:57:06 PM	H2 valve closed
12/20/2010	2:57:06 PM	BCl3 valve closed
12/20/2010	2:57:06 PM	PH3 valve closed
12/20/2010	2:57:06 PM	SiCl4 pre valve closed
12/20/2010	2:57:06 PM	SiCl4 post valve closed
12/20/2010	2:57:06 PM	Bubbler valve closed
12/20/2010	2:57:06 PM	Main Vac valve opened
12/20/2010	2:57:06 PM	Bypass valve opened
12/20/2010	2:57:06 PM	Helium MFC set to  0.000000
12/20/2010	2:57:06 PM	H2 MFC set to  0.000000
12/20/2010	2:57:06 PM	BCl3 MFC set to  0.000000
12/20/2010	2:57:06 PM	PHl3 MFC set to  0.000000
12/20/2010	2:57:06 PM	SiCl4 MFC set to  0.000000
12/20/2010	2:57:06 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	2:57:07 PM	Tube furnace set to 0
12/20/2010	2:58:07 PM	H2 valve closed
12/20/2010	2:58:07 PM	BCl3 valve closed
12/20/2010	2:58:07 PM	PH3 valve closed
12/20/2010	2:58:07 PM	SiCl4 pre valve closed
12/20/2010	2:58:07 PM	SiCl4 post valve closed
12/20/2010	2:58:07 PM	Bubbler valve closed
12/20/2010	2:58:07 PM	Helium valve opened
12/20/2010	2:58:07 PM	Main Vac valve opened
12/20/2010	2:58:07 PM	Bypass valve opened
12/20/2010	2:58:07 PM	Helium MFC set to  100.000000
12/20/2010	2:58:07 PM	H2 MFC set to  0.000000
12/20/2010	2:58:07 PM	BCl3 MFC set to  0.000000
12/20/2010	2:58:07 PM	PHl3 MFC set to  0.000000
12/20/2010	2:58:07 PM	SiCl4 MFC set to  0.000000
12/20/2010	2:58:07 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	2:58:07 PM	Tube furnace set to 0
12/20/2010	2:59:07 PM	Helium valve closed
12/20/2010	2:59:07 PM	H2 valve closed
12/20/2010	2:59:07 PM	BCl3 valve closed
12/20/2010	2:59:07 PM	PH3 valve closed
12/20/2010	2:59:07 PM	SiCl4 pre valve closed
12/20/2010	2:59:07 PM	SiCl4 post valve closed
12/20/2010	2:59:07 PM	Bubbler valve closed
12/20/2010	2:59:07 PM	Main Vac valve opened
12/20/2010	2:59:07 PM	Bypass valve opened
12/20/2010	2:59:07 PM	Helium MFC set to  0.000000
12/20/2010	2:59:07 PM	H2 MFC set to  0.000000
12/20/2010	2:59:07 PM	BCl3 MFC set to  0.000000
12/20/2010	2:59:07 PM	PHl3 MFC set to  0.000000
12/20/2010	2:59:07 PM	SiCl4 MFC set to  0.000000
12/20/2010	2:59:07 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	2:59:07 PM	Tube furnace set to 0
12/20/2010	3:00:07 PM	H2 valve closed
12/20/2010	3:00:07 PM	BCl3 valve closed
12/20/2010	3:00:07 PM	PH3 valve closed
12/20/2010	3:00:07 PM	SiCl4 pre valve closed
12/20/2010	3:00:07 PM	SiCl4 post valve closed
12/20/2010	3:00:07 PM	Bubbler valve closed
12/20/2010	3:00:07 PM	Helium valve opened
12/20/2010	3:00:07 PM	Main Vac valve opened
12/20/2010	3:00:07 PM	Bypass valve opened
12/20/2010	3:00:07 PM	Helium MFC set to  100.000000
12/20/2010	3:00:07 PM	H2 MFC set to  0.000000
12/20/2010	3:00:07 PM	BCl3 MFC set to  0.000000
12/20/2010	3:00:07 PM	PHl3 MFC set to  0.000000
12/20/2010	3:00:07 PM	SiCl4 MFC set to  0.000000
12/20/2010	3:00:07 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	3:00:07 PM	Tube furnace set to 0
12/20/2010	3:01:07 PM	Helium valve closed
12/20/2010	3:01:07 PM	H2 valve closed
12/20/2010	3:01:07 PM	BCl3 valve closed
12/20/2010	3:01:07 PM	PH3 valve closed
12/20/2010	3:01:07 PM	SiCl4 pre valve closed
12/20/2010	3:01:07 PM	SiCl4 post valve closed
12/20/2010	3:01:07 PM	Bubbler valve closed
12/20/2010	3:01:07 PM	Main Vac valve opened
12/20/2010	3:01:07 PM	Bypass valve opened
12/20/2010	3:01:07 PM	Helium MFC set to  0.000000
12/20/2010	3:01:07 PM	H2 MFC set to  0.000000
12/20/2010	3:01:07 PM	BCl3 MFC set to  0.000000
12/20/2010	3:01:07 PM	PHl3 MFC set to  0.000000
12/20/2010	3:01:07 PM	SiCl4 MFC set to  0.000000
12/20/2010	3:01:07 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	3:01:07 PM	Tube furnace set to 0
12/20/2010	3:01:41 PM	H2 valve closed
12/20/2010	3:01:41 PM	BCl3 valve closed
12/20/2010	3:01:41 PM	PH3 valve closed
12/20/2010	3:01:41 PM	SiCl4 pre valve closed
12/20/2010	3:01:41 PM	SiCl4 post valve closed
12/20/2010	3:01:41 PM	Bubbler valve closed
12/20/2010	3:01:41 PM	Helium valve opened
12/20/2010	3:01:41 PM	Main Vac valve opened
12/20/2010	3:01:41 PM	Bypass valve opened
12/20/2010	3:01:41 PM	Helium MFC set to  100.000000
12/20/2010	3:01:41 PM	H2 MFC set to  0.000000
12/20/2010	3:01:41 PM	BCl3 MFC set to  0.000000
12/20/2010	3:01:41 PM	PHl3 MFC set to  0.000000
12/20/2010	3:01:41 PM	SiCl4 MFC set to  0.000000
12/20/2010	3:01:41 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	3:01:42 PM	Tube furnace set to 0
12/20/2010	3:01:44 PM	Helium valve closed
12/20/2010	3:01:44 PM	H2 valve closed
12/20/2010	3:01:44 PM	BCl3 valve closed
12/20/2010	3:01:44 PM	PH3 valve closed
12/20/2010	3:01:44 PM	SiCl4 pre valve closed
12/20/2010	3:01:44 PM	SiCl4 post valve closed
12/20/2010	3:01:44 PM	Bubbler valve closed
12/20/2010	3:01:44 PM	Main Vac valve opened
12/20/2010	3:01:44 PM	Bypass valve opened
12/20/2010	3:01:44 PM	Helium MFC set to  0.000000
12/20/2010	3:01:44 PM	H2 MFC set to  0.000000
12/20/2010	3:01:44 PM	BCl3 MFC set to  0.000000
12/20/2010	3:01:44 PM	PHl3 MFC set to  0.000000
12/20/2010	3:01:44 PM	SiCl4 MFC set to  0.000000
12/20/2010	3:01:44 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	3:01:44 PM	Tube furnace set to 0
12/20/2010	3:02:24 PM	H2 valve closed
12/20/2010	3:02:24 PM	BCl3 valve closed
12/20/2010	3:02:24 PM	PH3 valve closed
12/20/2010	3:02:24 PM	SiCl4 pre valve closed
12/20/2010	3:02:24 PM	SiCl4 post valve closed
12/20/2010	3:02:24 PM	Bubbler valve closed
12/20/2010	3:02:24 PM	Helium valve opened
12/20/2010	3:02:24 PM	Main Vac valve opened
12/20/2010	3:02:24 PM	Bypass valve opened
12/20/2010	3:02:24 PM	Helium MFC set to  100.000000
12/20/2010	3:02:24 PM	H2 MFC set to  0.000000
12/20/2010	3:02:24 PM	BCl3 MFC set to  0.000000
12/20/2010	3:02:24 PM	PHl3 MFC set to  0.000000
12/20/2010	3:02:24 PM	SiCl4 MFC set to  0.000000
12/20/2010	3:02:24 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	3:02:24 PM	Tube furnace set to 0
12/20/2010	3:03:24 PM	Helium valve closed
12/20/2010	3:03:24 PM	H2 valve closed
12/20/2010	3:03:24 PM	BCl3 valve closed
12/20/2010	3:03:24 PM	PH3 valve closed
12/20/2010	3:03:24 PM	SiCl4 pre valve closed
12/20/2010	3:03:24 PM	SiCl4 post valve closed
12/20/2010	3:03:24 PM	Bubbler valve closed
12/20/2010	3:03:24 PM	Main Vac valve opened
12/20/2010	3:03:24 PM	Bypass valve opened
12/20/2010	3:03:24 PM	Helium MFC set to  0.000000
12/20/2010	3:03:24 PM	H2 MFC set to  0.000000
12/20/2010	3:03:24 PM	BCl3 MFC set to  0.000000
12/20/2010	3:03:24 PM	PHl3 MFC set to  0.000000
12/20/2010	3:03:24 PM	SiCl4 MFC set to  0.000000
12/20/2010	3:03:24 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	3:03:24 PM	Tube furnace set to 0
12/20/2010	3:04:24 PM	H2 valve closed
12/20/2010	3:04:24 PM	BCl3 valve closed
12/20/2010	3:04:24 PM	PH3 valve closed
12/20/2010	3:04:24 PM	SiCl4 pre valve closed
12/20/2010	3:04:24 PM	SiCl4 post valve closed
12/20/2010	3:04:24 PM	Bubbler valve closed
12/20/2010	3:04:24 PM	Helium valve opened
12/20/2010	3:04:24 PM	Main Vac valve opened
12/20/2010	3:04:24 PM	Bypass valve opened
12/20/2010	3:04:24 PM	Helium MFC set to  100.000000
12/20/2010	3:04:24 PM	H2 MFC set to  0.000000
12/20/2010	3:04:24 PM	BCl3 MFC set to  0.000000
12/20/2010	3:04:24 PM	PHl3 MFC set to  0.000000
12/20/2010	3:04:24 PM	SiCl4 MFC set to  0.000000
12/20/2010	3:04:24 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	3:04:24 PM	Tube furnace set to 0
12/20/2010	3:05:24 PM	Helium valve closed
12/20/2010	3:05:24 PM	H2 valve closed
12/20/2010	3:05:24 PM	BCl3 valve closed
12/20/2010	3:05:24 PM	PH3 valve closed
12/20/2010	3:05:24 PM	SiCl4 pre valve closed
12/20/2010	3:05:24 PM	SiCl4 post valve closed
12/20/2010	3:05:24 PM	Bubbler valve closed
12/20/2010	3:05:24 PM	Main Vac valve opened
12/20/2010	3:05:24 PM	Bypass valve opened
12/20/2010	3:05:24 PM	Helium MFC set to  0.000000
12/20/2010	3:05:24 PM	H2 MFC set to  0.000000
12/20/2010	3:05:24 PM	BCl3 MFC set to  0.000000
12/20/2010	3:05:24 PM	PHl3 MFC set to  0.000000
12/20/2010	3:05:24 PM	SiCl4 MFC set to  0.000000
12/20/2010	3:05:24 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	3:05:24 PM	Tube furnace set to 0
12/20/2010	3:06:24 PM	H2 valve closed
12/20/2010	3:06:24 PM	BCl3 valve closed
12/20/2010	3:06:24 PM	PH3 valve closed
12/20/2010	3:06:24 PM	SiCl4 pre valve closed
12/20/2010	3:06:24 PM	SiCl4 post valve closed
12/20/2010	3:06:24 PM	Bubbler valve closed
12/20/2010	3:06:24 PM	Helium valve opened
12/20/2010	3:06:24 PM	Main Vac valve opened
12/20/2010	3:06:24 PM	Bypass valve opened
12/20/2010	3:06:24 PM	Helium MFC set to  100.000000
12/20/2010	3:06:24 PM	H2 MFC set to  0.000000
12/20/2010	3:06:24 PM	BCl3 MFC set to  0.000000
12/20/2010	3:06:24 PM	PHl3 MFC set to  0.000000
12/20/2010	3:06:24 PM	SiCl4 MFC set to  0.000000
12/20/2010	3:06:24 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	3:06:25 PM	Tube furnace set to 0
12/20/2010	3:07:25 PM	Helium valve closed
12/20/2010	3:07:25 PM	H2 valve closed
12/20/2010	3:07:25 PM	BCl3 valve closed
12/20/2010	3:07:25 PM	PH3 valve closed
12/20/2010	3:07:25 PM	SiCl4 pre valve closed
12/20/2010	3:07:25 PM	SiCl4 post valve closed
12/20/2010	3:07:25 PM	Bubbler valve closed
12/20/2010	3:07:25 PM	Main Vac valve opened
12/20/2010	3:07:25 PM	Bypass valve opened
12/20/2010	3:07:25 PM	Helium MFC set to  0.000000
12/20/2010	3:07:25 PM	H2 MFC set to  0.000000
12/20/2010	3:07:25 PM	BCl3 MFC set to  0.000000
12/20/2010	3:07:25 PM	PHl3 MFC set to  0.000000
12/20/2010	3:07:25 PM	SiCl4 MFC set to  0.000000
12/20/2010	3:07:25 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	3:07:25 PM	Tube furnace set to 0
12/20/2010	3:08:25 PM	H2 valve closed
12/20/2010	3:08:25 PM	BCl3 valve closed
12/20/2010	3:08:25 PM	PH3 valve closed
12/20/2010	3:08:25 PM	SiCl4 pre valve closed
12/20/2010	3:08:25 PM	SiCl4 post valve closed
12/20/2010	3:08:25 PM	Bubbler valve closed
12/20/2010	3:08:25 PM	Helium valve opened
12/20/2010	3:08:25 PM	Main Vac valve opened
12/20/2010	3:08:25 PM	Bypass valve opened
12/20/2010	3:08:25 PM	Helium MFC set to  100.000000
12/20/2010	3:08:25 PM	H2 MFC set to  0.000000
12/20/2010	3:08:25 PM	BCl3 MFC set to  0.000000
12/20/2010	3:08:25 PM	PHl3 MFC set to  0.000000
12/20/2010	3:08:25 PM	SiCl4 MFC set to  0.000000
12/20/2010	3:08:25 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	3:08:25 PM	Tube furnace set to 0
12/20/2010	3:09:25 PM	Helium valve closed
12/20/2010	3:09:25 PM	H2 valve closed
12/20/2010	3:09:25 PM	BCl3 valve closed
12/20/2010	3:09:25 PM	PH3 valve closed
12/20/2010	3:09:25 PM	SiCl4 pre valve closed
12/20/2010	3:09:25 PM	SiCl4 post valve closed
12/20/2010	3:09:25 PM	Bubbler valve closed
12/20/2010	3:09:25 PM	Main Vac valve opened
12/20/2010	3:09:25 PM	Bypass valve opened
12/20/2010	3:09:25 PM	Helium MFC set to  0.000000
12/20/2010	3:09:25 PM	H2 MFC set to  0.000000
12/20/2010	3:09:25 PM	BCl3 MFC set to  0.000000
12/20/2010	3:09:25 PM	PHl3 MFC set to  0.000000
12/20/2010	3:09:25 PM	SiCl4 MFC set to  0.000000
12/20/2010	3:09:25 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	3:09:25 PM	Tube furnace set to 0
12/20/2010	3:09:26 PM	Run finished at 3:09 PM
12/20/2010	3:09:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/20/2010	3:19:10 PM	Helium MFC set to  10.000000
12/20/2010	3:19:11 PM	Helium valve opened
12/20/2010	3:25:06 PM	Helium MFC set to  0.000000
12/20/2010	3:25:08 PM	Helium valve closed
12/20/2010	3:25:58 PM	Helium MFC set to  10.000000
12/20/2010	3:25:59 PM	Helium valve opened
12/20/2010	3:31:53 PM	Helium MFC set to  0.000000
12/20/2010	3:31:54 PM	Helium valve closed
12/20/2010	3:32:45 PM	Main Vac valve closed
12/20/2010	3:32:47 PM	Bypass valve closed
12/20/2010	3:32:57 PM	Bypass valve opened
12/20/2010	3:32:58 PM	Main Vac valve opened
12/20/2010	3:33:06 PM	Helium MFC set to  10.000000
12/20/2010	3:33:07 PM	Helium valve opened
12/20/2010	3:33:43 PM	Helium MFC set to  0.000000
12/20/2010	3:33:44 PM	Helium valve closed
12/20/2010	3:33:59 PM	Tube furnace set to 150
12/20/2010	3:35:41 PM	Recipe started at 3:35 PM
12/20/2010	3:35:41 PM	Helium valve closed
12/20/2010	3:35:41 PM	BCl3 valve closed
12/20/2010	3:35:41 PM	PH3 valve closed
12/20/2010	3:35:41 PM	SiCl4 pre valve closed
12/20/2010	3:35:41 PM	SiCl4 post valve closed
12/20/2010	3:35:41 PM	Main Vac valve closed
12/20/2010	3:35:41 PM	Bypass valve closed
12/20/2010	3:35:41 PM	Bubbler valve closed
12/20/2010	3:35:41 PM	H2 valve opened
12/20/2010	3:35:41 PM	Helium MFC set to  0.000000
12/20/2010	3:35:41 PM	H2 MFC set to  500.000000
12/20/2010	3:35:41 PM	BCl3 MFC set to  0.000000
12/20/2010	3:35:41 PM	PHl3 MFC set to  0.000000
12/20/2010	3:35:41 PM	SiCl4 MFC set to  0.000000
12/20/2010	3:35:41 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	3:35:41 PM	Tube furnace set to 200
12/20/2010	3:37:00 PM	Helium valve closed
12/20/2010	3:37:00 PM	BCl3 valve closed
12/20/2010	3:37:00 PM	PH3 valve closed
12/20/2010	3:37:00 PM	SiCl4 pre valve closed
12/20/2010	3:37:00 PM	SiCl4 post valve closed
12/20/2010	3:37:00 PM	Main Vac valve closed
12/20/2010	3:37:00 PM	Bypass valve closed
12/20/2010	3:37:00 PM	H2 valve opened
12/20/2010	3:37:00 PM	Bubbler valve opened
12/20/2010	3:37:00 PM	Helium MFC set to  0.000000
12/20/2010	3:37:00 PM	H2 MFC set to  400.000000
12/20/2010	3:37:00 PM	BCl3 MFC set to  0.000000
12/20/2010	3:37:00 PM	PHl3 MFC set to  0.000000
12/20/2010	3:37:00 PM	SiCl4 MFC set to  0.000000
12/20/2010	3:37:00 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	3:37:00 PM	Tube furnace set to 1001
12/20/2010	4:02:00 PM	Helium valve closed
12/20/2010	4:02:00 PM	PH3 valve closed
12/20/2010	4:02:00 PM	Main Vac valve closed
12/20/2010	4:02:00 PM	Bypass valve closed
12/20/2010	4:02:00 PM	H2 valve opened
12/20/2010	4:02:00 PM	BCl3 valve opened
12/20/2010	4:02:00 PM	SiCl4 pre valve opened
12/20/2010	4:02:00 PM	SiCl4 post valve opened
12/20/2010	4:02:00 PM	Bubbler valve opened
12/20/2010	4:02:00 PM	Helium MFC set to  0.000000
12/20/2010	4:02:00 PM	H2 MFC set to  500.000000
12/20/2010	4:02:00 PM	BCl3 MFC set to  10.000000
12/20/2010	4:02:00 PM	PHl3 MFC set to  0.000000
12/20/2010	4:02:00 PM	SiCl4 MFC set to  50.000000
12/20/2010	4:02:00 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	4:02:00 PM	Tube furnace set to 1000
12/20/2010	4:07:00 PM	H2 valve closed
12/20/2010	4:07:00 PM	BCl3 valve closed
12/20/2010	4:07:00 PM	PH3 valve closed
12/20/2010	4:07:00 PM	SiCl4 pre valve closed
12/20/2010	4:07:00 PM	SiCl4 post valve closed
12/20/2010	4:07:00 PM	Main Vac valve closed
12/20/2010	4:07:00 PM	Bypass valve closed
12/20/2010	4:07:00 PM	Helium valve opened
12/20/2010	4:07:00 PM	Bubbler valve opened
12/20/2010	4:07:00 PM	Helium MFC set to  400.000000
12/20/2010	4:07:00 PM	H2 MFC set to  0.000000
12/20/2010	4:07:00 PM	BCl3 MFC set to  0.000000
12/20/2010	4:07:00 PM	PHl3 MFC set to  0.000000
12/20/2010	4:07:00 PM	SiCl4 MFC set to  0.000000
12/20/2010	4:07:00 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	4:07:00 PM	Tube furnace set to 0
12/20/2010	4:13:55 PM	Helium valve closed
12/20/2010	4:13:55 PM	H2 valve closed
12/20/2010	4:13:55 PM	BCl3 valve closed
12/20/2010	4:13:55 PM	PH3 valve closed
12/20/2010	4:13:55 PM	SiCl4 pre valve closed
12/20/2010	4:13:55 PM	SiCl4 post valve closed
12/20/2010	4:13:55 PM	Main Vac valve closed
12/20/2010	4:13:55 PM	Bypass valve closed
12/20/2010	4:13:55 PM	Bubbler valve closed
12/20/2010	4:13:55 PM	Helium MFC set to  0.000000
12/20/2010	4:13:55 PM	H2 MFC set to  0.000000
12/20/2010	4:13:55 PM	BCl3 MFC set to  0.000000
12/20/2010	4:13:55 PM	PHl3 MFC set to  0.000000
12/20/2010	4:13:55 PM	SiCl4 MFC set to  0.000000
12/20/2010	4:13:55 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	4:13:55 PM	Tube furnace set to 0
12/20/2010	4:13:55 PM	Run finished at 4:13 PM
12/20/2010	4:13:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2010	4:13:58 PM	Recipe started at 4:13 PM
12/20/2010	4:13:58 PM	Helium valve closed
12/20/2010	4:13:58 PM	H2 valve closed
12/20/2010	4:13:58 PM	BCl3 valve closed
12/20/2010	4:13:58 PM	PH3 valve closed
12/20/2010	4:13:58 PM	SiCl4 pre valve closed
12/20/2010	4:13:58 PM	SiCl4 post valve closed
12/20/2010	4:13:58 PM	Main Vac valve closed
12/20/2010	4:13:58 PM	Bubbler valve closed
12/20/2010	4:13:58 PM	Bypass valve opened
12/20/2010	4:13:58 PM	Helium MFC set to  0.000000
12/20/2010	4:13:58 PM	H2 MFC set to  0.000000
12/20/2010	4:13:58 PM	BCl3 MFC set to  0.000000
12/20/2010	4:13:58 PM	PHl3 MFC set to  0.000000
12/20/2010	4:13:58 PM	SiCl4 MFC set to  0.000000
12/20/2010	4:13:58 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	4:13:59 PM	Tube furnace set to 0
12/20/2010	4:14:01 PM	Run aborted at 4:14 PM
12/20/2010	4:14:01 PM	Helium valve closed
12/20/2010	4:14:01 PM	H2 valve closed
12/20/2010	4:14:01 PM	BCl3 valve closed
12/20/2010	4:14:01 PM	PH3 valve closed
12/20/2010	4:14:01 PM	SiCl4 pre valve closed
12/20/2010	4:14:01 PM	SiCl4 post valve closed
12/20/2010	4:14:01 PM	Bypass valve closed
12/20/2010	4:14:01 PM	Main Vac valve closed
12/20/2010	4:14:01 PM	Bubbler valve closed
12/20/2010	4:14:01 PM	Helium MFC set to  0.000000
12/20/2010	4:14:01 PM	H2 MFC set to  0.000000
12/20/2010	4:14:01 PM	BCl3 MFC set to  0.000000
12/20/2010	4:14:01 PM	PHl3 MFC set to  0.000000
12/20/2010	4:14:01 PM	SiCl4 MFC set to  0.000000
12/20/2010	4:14:01 PM	Tube furnace set to 0
12/20/2010	4:14:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2010	4:14:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/20/2010	4:14:07 PM	Recipe started at 4:14 PM
12/20/2010	4:14:07 PM	H2 valve closed
12/20/2010	4:14:07 PM	BCl3 valve closed
12/20/2010	4:14:07 PM	PH3 valve closed
12/20/2010	4:14:07 PM	SiCl4 pre valve closed
12/20/2010	4:14:07 PM	SiCl4 post valve closed
12/20/2010	4:14:07 PM	Main Vac valve closed
12/20/2010	4:14:07 PM	Bypass valve closed
12/20/2010	4:14:07 PM	Bubbler valve closed
12/20/2010	4:14:07 PM	Helium valve opened
12/20/2010	4:14:07 PM	Helium MFC set to  500.000000
12/20/2010	4:14:07 PM	H2 MFC set to  0.000000
12/20/2010	4:14:07 PM	BCl3 MFC set to  0.000000
12/20/2010	4:14:07 PM	PHl3 MFC set to  0.000000
12/20/2010	4:14:07 PM	SiCl4 MFC set to  0.000000
12/20/2010	4:14:07 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	4:14:07 PM	Tube furnace set to 0
12/20/2010	4:14:26 PM	Helium valve closed
12/20/2010	4:14:26 PM	H2 valve closed
12/20/2010	4:14:26 PM	BCl3 valve closed
12/20/2010	4:14:26 PM	PH3 valve closed
12/20/2010	4:14:26 PM	SiCl4 pre valve closed
12/20/2010	4:14:26 PM	SiCl4 post valve closed
12/20/2010	4:14:26 PM	Main Vac valve closed
12/20/2010	4:14:26 PM	Bypass valve closed
12/20/2010	4:14:26 PM	Bubbler valve closed
12/20/2010	4:14:26 PM	Helium MFC set to  0.000000
12/20/2010	4:14:26 PM	H2 MFC set to  0.000000
12/20/2010	4:14:26 PM	BCl3 MFC set to  0.000000
12/20/2010	4:14:26 PM	PHl3 MFC set to  0.000000
12/20/2010	4:14:26 PM	SiCl4 MFC set to  0.000000
12/20/2010	4:14:26 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	4:14:27 PM	Tube furnace set to 0
12/20/2010	4:14:27 PM	Run finished at 4:14 PM
12/20/2010	4:14:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/20/2010	4:15:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2010	4:15:59 PM	Recipe started at 4:15 PM
12/20/2010	4:15:59 PM	Helium valve closed
12/20/2010	4:15:59 PM	H2 valve closed
12/20/2010	4:15:59 PM	BCl3 valve closed
12/20/2010	4:15:59 PM	PH3 valve closed
12/20/2010	4:15:59 PM	SiCl4 pre valve closed
12/20/2010	4:15:59 PM	SiCl4 post valve closed
12/20/2010	4:15:59 PM	Main Vac valve closed
12/20/2010	4:15:59 PM	Bubbler valve closed
12/20/2010	4:15:59 PM	Bypass valve opened
12/20/2010	4:15:59 PM	Helium MFC set to  0.000000
12/20/2010	4:15:59 PM	H2 MFC set to  0.000000
12/20/2010	4:15:59 PM	BCl3 MFC set to  0.000000
12/20/2010	4:15:59 PM	PHl3 MFC set to  0.000000
12/20/2010	4:15:59 PM	SiCl4 MFC set to  0.000000
12/20/2010	4:15:59 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	4:16:00 PM	Tube furnace set to 0
12/20/2010	4:16:50 PM	Helium valve closed
12/20/2010	4:16:50 PM	H2 valve closed
12/20/2010	4:16:50 PM	BCl3 valve closed
12/20/2010	4:16:50 PM	PH3 valve closed
12/20/2010	4:16:50 PM	SiCl4 pre valve closed
12/20/2010	4:16:50 PM	SiCl4 post valve closed
12/20/2010	4:16:50 PM	Bubbler valve closed
12/20/2010	4:16:50 PM	Main Vac valve opened
12/20/2010	4:16:50 PM	Bypass valve opened
12/20/2010	4:16:50 PM	Helium MFC set to  0.000000
12/20/2010	4:16:50 PM	H2 MFC set to  0.000000
12/20/2010	4:16:50 PM	BCl3 MFC set to  0.000000
12/20/2010	4:16:50 PM	PHl3 MFC set to  0.000000
12/20/2010	4:16:50 PM	SiCl4 MFC set to  0.000000
12/20/2010	4:16:50 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	4:16:51 PM	Tube furnace set to 0
12/20/2010	4:16:51 PM	Run finished at 4:16 PM
12/20/2010	4:16:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2010	8:51:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/20/2010	8:51:11 PM	Recipe started at 8:51 PM
12/20/2010	8:51:11 PM	H2 valve closed
12/20/2010	8:51:11 PM	BCl3 valve closed
12/20/2010	8:51:11 PM	PH3 valve closed
12/20/2010	8:51:11 PM	SiCl4 pre valve closed
12/20/2010	8:51:11 PM	SiCl4 post valve closed
12/20/2010	8:51:11 PM	Main Vac valve closed
12/20/2010	8:51:11 PM	Bypass valve closed
12/20/2010	8:51:11 PM	Bubbler valve closed
12/20/2010	8:51:11 PM	Helium valve opened
12/20/2010	8:51:11 PM	Helium MFC set to  500.000000
12/20/2010	8:51:11 PM	H2 MFC set to  0.000000
12/20/2010	8:51:11 PM	BCl3 MFC set to  0.000000
12/20/2010	8:51:11 PM	PHl3 MFC set to  0.000000
12/20/2010	8:51:11 PM	SiCl4 MFC set to  0.000000
12/20/2010	8:51:11 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	8:51:11 PM	Tube furnace set to 0
12/20/2010	8:52:31 PM	Helium valve closed
12/20/2010	8:52:31 PM	H2 valve closed
12/20/2010	8:52:31 PM	BCl3 valve closed
12/20/2010	8:52:31 PM	PH3 valve closed
12/20/2010	8:52:31 PM	SiCl4 pre valve closed
12/20/2010	8:52:31 PM	SiCl4 post valve closed
12/20/2010	8:52:31 PM	Main Vac valve closed
12/20/2010	8:52:31 PM	Bypass valve closed
12/20/2010	8:52:31 PM	Bubbler valve closed
12/20/2010	8:52:31 PM	Helium MFC set to  0.000000
12/20/2010	8:52:31 PM	H2 MFC set to  0.000000
12/20/2010	8:52:31 PM	BCl3 MFC set to  0.000000
12/20/2010	8:52:31 PM	PHl3 MFC set to  0.000000
12/20/2010	8:52:31 PM	SiCl4 MFC set to  0.000000
12/20/2010	8:52:31 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	8:52:31 PM	Tube furnace set to 0
12/20/2010	8:52:31 PM	Run finished at 8:52 PM
12/20/2010	8:52:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/20/2010	8:54:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/20/2010	8:54:16 PM	Recipe started at 8:54 PM
12/20/2010	8:54:16 PM	Helium valve closed
12/20/2010	8:54:16 PM	H2 valve closed
12/20/2010	8:54:16 PM	BCl3 valve closed
12/20/2010	8:54:16 PM	PH3 valve closed
12/20/2010	8:54:16 PM	SiCl4 pre valve closed
12/20/2010	8:54:16 PM	SiCl4 post valve closed
12/20/2010	8:54:16 PM	Main Vac valve closed
12/20/2010	8:54:16 PM	Bubbler valve closed
12/20/2010	8:54:16 PM	Bypass valve opened
12/20/2010	8:54:16 PM	Helium MFC set to  0.000000
12/20/2010	8:54:16 PM	H2 MFC set to  0.000000
12/20/2010	8:54:16 PM	BCl3 MFC set to  0.000000
12/20/2010	8:54:16 PM	PHl3 MFC set to  0.000000
12/20/2010	8:54:16 PM	SiCl4 MFC set to  0.000000
12/20/2010	8:54:16 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	8:54:16 PM	Tube furnace set to 0
12/20/2010	8:55:13 PM	Helium valve closed
12/20/2010	8:55:13 PM	H2 valve closed
12/20/2010	8:55:13 PM	BCl3 valve closed
12/20/2010	8:55:13 PM	PH3 valve closed
12/20/2010	8:55:13 PM	SiCl4 pre valve closed
12/20/2010	8:55:13 PM	SiCl4 post valve closed
12/20/2010	8:55:13 PM	Bubbler valve closed
12/20/2010	8:55:13 PM	Main Vac valve opened
12/20/2010	8:55:13 PM	Bypass valve opened
12/20/2010	8:55:13 PM	Helium MFC set to  0.000000
12/20/2010	8:55:13 PM	H2 MFC set to  0.000000
12/20/2010	8:55:13 PM	BCl3 MFC set to  0.000000
12/20/2010	8:55:13 PM	PHl3 MFC set to  0.000000
12/20/2010	8:55:13 PM	SiCl4 MFC set to  0.000000
12/20/2010	8:55:13 PM	Bypass solenoid MFC set to  0.000000
12/20/2010	8:55:13 PM	Tube furnace set to 0
12/20/2010	8:55:13 PM	Run finished at 8:55 PM
12/20/2010	8:55:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
